Plasma Etching I

Presentations

• In-Plasma Photo-Assisted Etching

  COFFEE_KLATCH · Invited

  Oct. 15, 2015, 10:00 AM – Oct. 15, 2015, 10:30 AM

  Authors

  • Demetre Economou

    • University of Houston

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• Advanced Simulation Technology to Design Etching Process on CMOS Devices

  COFFEE_KLATCH · Invited

  Oct. 15, 2015, 10:30 AM – Oct. 15, 2015, 11:00 AM

  Authors

  • Nobuyuki Kuboi

    • Sony Corporation

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• Conceptual Design of Electron-Beam Generated Plasma Tools

  ORAL

  Oct. 15, 2015, 11:00 AM – Oct. 15, 2015, 11:15 AM

  Authors

  • Ankur Agarwal

    • Applied Materials Inc.

  • Shahid Rauf

    • Applied Materials Inc.

  • Leonid Dorf

    • Applied Materials Inc.

  • Ken Collins

    • Applied Materials Inc.

  • David Boris

    • Plasma Physics Division, Naval Research Laboratory

  • Scott Walton

    • Plasma Physics Division, Naval Research Laboratory

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• Surface rippling by oblique ion incidence during plasma etching of silicon: Experimental demonstration using sheath control plates

  ORAL

  Oct. 15, 2015, 11:15 AM – Oct. 15, 2015, 11:30 AM

  Authors

  • Nobuya Nakazaki

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

  • Haruka Matsumoto

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

  • Koji Eriguchi

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

  • Kouichi Ono

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

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• Apparatus and Method to Plasma Etch Inner Surface of the Varied Diameter Cylindrical Structure

  ORAL

  Oct. 15, 2015, 11:30 AM – Oct. 15, 2015, 11:45 AM

  Authors

  • Janardan Upadhyay

    • Old Dominion University

  • Do Im

    • Old Dominion University

  • J. Peshl

    • Old Dominion University

  • S. Popovic

    • Old Dominion University

  • Anne-Marie Valente-Feliciano

    • Thomas Jefferson National Accelerator Facility

  • L. Phillips

    • Thomas Jefferson National Accelerator Facility

  • L. Vuskovic

    • Old Dominion University

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• Photoluminescence of GaN Film Exposed to Chlorine-Containing Plasma

  ORAL

  Oct. 15, 2015, 11:45 AM – Oct. 15, 2015, 12:00 PM

  Authors

  • Daisuke Ogawa

    • Chubu University

  • Yoshitsugu Banno

    • Chubu University

  • Yoshitaka Nakano

    • Chubu University

  • Keiji Nakamura

    • Chubu University

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