A global model study of oxygen discharges -- formation and annihilation of the singlet molecular metastables and effects of the electron energy distribution function
POSTER
Abstract
A revised reaction set for oxygen plasma modelling was implemented in a volume average global model that considers only Maxwellian electron energy distribution function. The results showed that the state could be present in the discharge in amounts higher than the state. A further study has been realized through changes in the electron energy distribution function. Differences in the results calculated using Maxwellian and non-Maxwellian distributions demonstrate the importance of using a proper electron energy distribution function in plasma modelling.
*This work was supported by Brazilian Agencies CNPq - (153528/2012-5), CAPES,FAPESP/PRONEX - (2011/50733-0 and 2013/03401-6), the Icelandic Research Fund Grant (130029-053), and the Swedish Government Agency for Innovation Systems (VINNOVA - 2014-04876).