Inductively Coupled Plasmas

Presentations

• Student Award Finalist: Negative Power Absorption in Low-Pressure Inductive Discharges

  ORAL

  Oct. 13, 2015, 1:30 PM – Oct. 13, 2015, 1:45 PM

  Authors

  • Jan Trieschmann

    • Ruhr-University Bochum, Germany
    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany
    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Bochum, Germany

  • Martin Lapke

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Bochum, Germany

  • Ralf Peter Brinkmann

    • Ruhr-University Bochum, Germany
    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Bochum, Germany

  • Thomas Mussenbrock

    • Ruhr University Bochum
    • Ruhr Universit\"at Bochum
    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany
    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Bochum, Germany

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• 3D-PIC simulation of an inductively coupled ion source

  ORAL

  Oct. 13, 2015, 1:45 PM – Oct. 13, 2015, 2:00 PM

  Authors

  • Robert Henrich

    • Justus-Liebig-University Giessen, Institut fuer Theoretische Physik

  • Nina Sarah Muehlich

    • Justus-Liebig-University Giessen, Institut fuer Theoretische Physik

  • Michael Becker

    • Justus-Liebig-University Giessen, Institut fuer Theoretische Physik

  • Christian Heiliger

    • Justus-Liebig-University Giessen, Institut fuer Theoretische Physik

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• Vibrational kinetics in Cl$_{2}$ and O$_{2}$ low-pressure inductively-coupled plasmas

  ORAL

  Oct. 13, 2015, 2:00 PM – Oct. 13, 2015, 2:15 PM

  Authors

  • J.-P. Booth

    • Ecole Polytechnique
    • LPP-CNRS, Ecole Polytechnique, Palaiseau, France
    • LPP-CNRS, Ecole Polytechnique, France

  • Mickael Foucher

    • LPP-CNRS, Ecole Polytechnique, Palaiseau, France

  • Daniil Marinov

    • LPP-CNRS, Ecole Polytechnique, Palaiseau, France

  • Pascal Chabert

    • LPP-CNRS, Ecole Polytechnique, UPMC, Universite Paris 11
    • Laboratoire de Physique des Plasmas - CNRS - UPMC
    • LPP, CNRS Ecole Polytechnique
    • LPP-CNRS, Ecole Polytechnique, Palaiseau, France
    • Ecole Polytechnique

  • Anna Annusova

    • IPFN, IST, Universidade de Lisboa, Portugal

  • Vasco Guerra

    • Instituto de Plasmas e Fus\~{a}o Nuclear, Instituto Superior T\'{e}cnico, Universidade de Lisboa
    • IPFN, IST, Universidade de Lisboa, Portugal

  • Ankur Agarwal

    • Applied Materials, Sunnyvale, CA

  • Shahid Rauf

    • Applied Materials
    • Applied Materials, Sunnyvale, CA

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• Characterization of Inductively Coupled Plasmas in High Power, High Pressure Regime

  ORAL

  Oct. 13, 2015, 2:15 PM – Oct. 13, 2015, 2:30 PM

  Authors

  • Jun-Chieh Wang

    • Applied Materials, Inc

  • Jason Kenney

    • Applied Materials, Inc

  • Ankur Agarwal

    • Applied Materials, Inc

  • Michael Nichols

    • Applied Materials, Inc

  • James Rogers

    • Applied Materials, Inc

  • Shahid Rauf

    • Applied Materials, Inc

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• Ignition Delay in a Pulsed Inductively Coupled Plasma (ICP) in Tandem with an Auxiliary ICP

  ORAL

  Oct. 13, 2015, 2:30 PM – Oct. 13, 2015, 2:45 PM

  Authors

  • Vincent M. Donnelly

    • University of Houston

  • Lei Liu

    • University of Houston

  • Shyam Sridhar

    • University of Houston

  • Demetre J. Economou

    • University of Houston

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• Producing ion waves from acoustic pressure waves in pulsed ICP: Modeling vs. Experiments

  ORAL

  Oct. 13, 2015, 2:45 PM – Oct. 13, 2015, 3:00 PM

  Authors

  • Emilie Despiau-Pujo

    • CNRS/Univ. Grenoble Alpes/CEA, LTM

  • Gilles Cunge

    • CNRS/Univ. Grenoble Alpes/CEA, LTM

  • Maxime Darnon

    • CNRS/Univ. Grenoble Alpes/CEA, LTM

  • Nader Sadeghi

    • CNRS/Univ. Grenoble Alpes/CEA, LTM

  • Nicholas Braithwaite

    • Open University

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• Electronegative Plasma Instabilities in Pulsed Plasmas

  ORAL

  Oct. 13, 2015, 3:00 PM – Oct. 13, 2015, 3:15 PM

  Authors

  • Patrick Pribyl

    • Dept. Physics University of California, Los Angeles

  • Walter Gekelman

    • Dept. Physics University of California, Los Angeles
    • Dept of Physics, University of California Los Angeles

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• Characterization of inductively coupled Ar and Ar/CH4 plasma using tuned single Langmuir probe and fluid simulation

  ORAL

  Oct. 13, 2015, 3:15 PM – Oct. 13, 2015, 3:30 PM

  Authors

  • Ju-Hong Cha

    • Department of Electrical and Computer Engineering, Pusan National University

  • Moon-Ki Han

    • Department of Electrical and Computer Engineering, Pusan National University

  • Kwon-Sang Seo

    • Department of Electrical and Computer Engineering, Pusan National University

  • Dong-Hyun Kim

    • Department of Electrical and Computer Engineering, Pusan National University

  • Hae June Lee

    • Department of Electrical and Computer Engineering, Pusan National University

  • Ho-Jun Lee

    • Pusan National University
    • Department of Electrical and Computer Engineering, Pusan National University

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