Diagnostic Probes

Presentations

• Curling probe measurement of large-volume pulsed plasma confined by surface magnetic field

  ORAL

  Oct. 13, 2015, 10:00 AM – Oct. 13, 2015, 10:15 AM

  Authors

  • Anil Pandey

    • Chubu University

  • Wataru Sakakibara

    • DOWA Thermotech

  • Hiroyuki Matsuoka

    • DOWA Thermotech

  • Keiji Nakamura

    • Chubu University

  • Hideo Sugai

    • Chubu University

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• Electrostatic and Electromagnetic Resonances of the Curling probe

  ORAL

  Oct. 13, 2015, 10:15 AM – Oct. 13, 2015, 10:30 AM

  Authors

  • Ali Arshadi

    • Institute for Theoretical Electrical Engineering, Ruhr University Bochum, Germany

  • Leila Valadbeigi

    • Power Systems Technology and Power Mechatronics, Ruhr University Bochum, Germany

  • Ralf Peter Brinkmann

    • Institute for Theoretical Electrical Engineering, Ruhr University Bochum, Germany

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• Analyses of Different Techniques for the Plasma Probe Diagnostics

  ORAL

  Oct. 13, 2015, 10:30 AM – Oct. 13, 2015, 10:45 AM

  Authors

  • Valery Godyak

    • University of Michigan

  • Benjamin Alexandrovich

    • Plasma Sensors

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• Kinetic Damping in the Spectrum of the Spherical Impedance Probe

  ORAL

  Oct. 13, 2015, 10:45 AM – Oct. 13, 2015, 11:00 AM

  Authors

  • Jens Oberrath

    • Leuphana University L\"uneburg, Germany
    • Institute of Product and Process Innovation, Leuphana University Lueneburg, Germany

  • Ralf Peter Brinkmann

    • Ruhr University Bochum
    • Ruhr-University Bochum
    • Theoretical Electrical Engineering, Ruhr University Bochum, Germany

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• Using the Multipole Resonance Probe to Stabilize the Electron Density During a Reactive Sputter Process

  ORAL

  Oct. 13, 2015, 11:00 AM – Oct. 13, 2015, 11:15 AM

  Authors

  • Moritz Oberberg

    • Ruhr-University Bochum

  • Tim Styrnoll

    • Ruhr-University Bochum

  • Stefan Ries

    • Ruhr-University Bochum

  • Stefan Bienholz

    • Ruhr-University Bochum

  • Peter Awakowicz

    • Ruhr-University Bochum

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• Wireless sensor technology for in-situ plasma process monitoring

  COFFEE_KLATCH · Invited

  Oct. 13, 2015, 11:15 AM – Oct. 13, 2015, 11:45 AM

  Authors

  • David Gahan

    • Impedans Ltd

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• Phase-resolved measurement of surface charge deposition in a laterally patterned barrier discharge system

  ORAL

  Oct. 13, 2015, 11:45 AM – Oct. 13, 2015, 12:00 PM

  Authors

  • Lars Stollenwerk

    • University of Greifswald
    • University of Greifswald, Inst. of Physics

  • Robert Wild

    • University of Greifswald
    • University of Greifswald, Inst. of Physics

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