Capacitively Coupled Plasmas I

Presentations

• Gaining greater control and understanding of processing plasmas through Tailored Voltage Waveforms

  COFFEE_KLATCH · Invited

  Oct. 13, 2015, 10:00 AM – Oct. 13, 2015, 10:30 AM

  Authors

  • Erik Johnson

    • LPICM-CNRS, Ecole Polytechnique, France
    • LPICM-CNRS, Ecole Polytechnique

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• Control of electron heating and ion energy distributions in capacitive plasmas by voltage waveform tailoring based on a novel power supply and impedance matching

  ORAL

  Oct. 13, 2015, 10:30 AM – Oct. 13, 2015, 10:45 AM

  Authors

  • Birk Berger

    • West Virginia University

  • James Franek

    • West Virginia University

  • Steven Brandt

    • West Virginia University

  • Martin Liese

    • Barthel HF

  • Matthias Barthel

    • Barthel HF

  • Edmund Schuengel

    • West Virginia University

  • Mark Koepke

    • West Virginia University

  • Julian Schulze

    • West Virginia University, Morgantown, USA
    • West Virginia University

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• Control of electron heating dynamics and DC self bias in electronegative capacitive CF$_{4}$ plasmas by voltage waveform tailoring

  ORAL

  Oct. 13, 2015, 10:45 AM – Oct. 13, 2015, 11:00 AM

  Authors

  • Julian Schulze

    • West Virginia University, Morgantown, USA
    • West Virginia University

  • Bastien Bruneau

    • Ecole Polytechnique

  • Erik Johnson

    • Ecole Polytechnique

  • Jean-Paul Booth

    • Ecole Polytechnique

  • Trevor Lafleur

    • Ecole Polytechnique

  • Ihor Korolov

    • Hungarian Academy of Sciences

  • Aranka Derzsi

    • Hungarian Academy of Sciences

  • Zoltan Donko

    • Hungarian Academy of Sciences

  • Steven Brandt

    • West Virginia University

  • Edmund Schuengel

    • West Virginia University

  • Arthur Greb

    • York Plasma Institute

  • Deborah O'Connell

    • York Plasma Institute

  • Timo Gans

    • York Plasma Institute

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• Student Award Finalist: Comparison of the effect of sawtooth-like voltage waveforms on discharge dynamics of Ar, H$_{2}$, and CF$_{4}$ plasmas

  ORAL

  Oct. 13, 2015, 11:00 AM – Oct. 13, 2015, 11:15 AM

  Authors

  • Bastien Bruneau

    • LPICM-CNRS, Ecole Polytechnique, France

  • Erik Johnson

    • LPICM-CNRS, Ecole Polytechnique, France
    • LPICM-CNRS, Ecole Polytechnique

  • T. Gans

    • York Plasma Institute, University of York
    • York University
    • York Plasma Institute, Department of Physics, University of York, Heslington, York, YO10 5DD
    • York Plasma Institute, Univ. of York, UK

  • D. O'Connell

    • York Plasma Institute, Department of Physics, University of York, Heslington, York, YO10 5DD
    • York Plasma Institute, Univ. of York, UK

  • A. Greb

    • York Plasma Institute, Univ. of York, UK

  • I. Korolov

    • Wigner Research Centre for Physics, Budapest, Hungary

  • A. Derzsi

    • Wigner Research Centre for Physics, Budapest, Hungary

  • Z. Donko

    • Wigner Research Centre for Physics, Budapest, Hungary

  • E. Schungel

    • West Virginia University, Morgantown, USA
    • Dept of Physics, West Virginia Univ., USA

  • S. Brandt

    • West Virginia University
    • Dept of Physics, West Virginia Univ., USA

  • J. Schulze

    • West Virginia University
    • Dept of Physics, West Virginia Univ., USA

  • P. Diomede

    • Plasma Processing Laboratory, Univ. of Houston, USA

  • D.J. Economou

    • Plasma Processing Laboratory, Univ. of Houston, USA

  • S. Longo

    • Dipartimento di Chimica dell' Universita' di Bari, Italy

  • T. Lafleur

    • Laboratoire de Physique des Plasmas - CNRS - UPMC
    • LPP-CNRS, Ecole Polytechnique, France

  • J.-P. Booth

    • Ecole Polytechnique
    • LPP-CNRS, Ecole Polytechnique, Palaiseau, France
    • LPP-CNRS, Ecole Polytechnique, France

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• Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges

  ORAL

  Oct. 13, 2015, 11:15 AM – Oct. 13, 2015, 11:30 AM

  Authors

  • M.A. Lieberman

    • University of California at Berkeley
    • University of California, Berkeley
    • Univ of California - Berkeley

  • A.J. Lichtenberg

    • University of California, Berkeley

  • Emi Kawamura

    • University of California, Berkeley

  • A.M. Marakhtanov

    • Lam Research Corporation

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• Non-Linear Electron Resonance Heating in CCRF Discharges: A Kinetic Interpretation

  ORAL

  Oct. 13, 2015, 11:30 AM – Oct. 13, 2015, 11:45 AM

  Authors

  • Sebastian Wilczek

    • Ruhr-University Bochum, Germany

  • Jan Trieschmann

    • Ruhr-University Bochum, Germany
    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Germany
    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Bochum, Germany

  • Julian Schulze

    • West Virginia University, Morgantown, USA
    • West Virginia University

  • E. Schungel

    • West Virginia University, Morgantown, USA
    • Dept of Physics, West Virginia Univ., USA

  • Denis Eremin

    • Ruhr-University Bochum, Germany

  • Ralf Peter Brinkmann

    • Ruhr-University Bochum, Germany
    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Bochum, Germany

  • A. Derzsi

    • Wigner Research Centre for Physics, Budapest, Hungary

  • I. Korolov

    • Wigner Research Centre for Physics, Budapest, Hungary

  • Peter Hartmann

    • Wigner Research Centre for Physics, Budapest, Hungary

  • Z. Donko

    • Wigner Research Centre for Physics, Budapest, Hungary

  • Thomas Mussenbrock

    • Ruhr University Bochum
    • Ruhr Universit\"at Bochum
    • Ruhr-University Bochum
    • Ruhr-University Bochum, Germany
    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Bochum, Germany

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• Electron Heating Mode Transitions in Nitrogen (13.56 and 40.68) MHz RF-CCPs

  ORAL

  Oct. 13, 2015, 11:45 AM – Oct. 13, 2015, 12:00 PM

  Authors

  • Ummugul Erozbek Gungor

    • Middle East Technical University

  • Sinan Kadri Bilikmen

    • Middle East Technical University

  • Demiral Akbar

    • Hacettepe University

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• Electron Heating in Capacitively Coupled RF Discharges Investigated with the Smooth Step Model

  ORAL

  Oct. 13, 2015, 12:00 PM – Oct. 13, 2015, 12:15 PM

  Authors

  • Ralf Peter Brinkmann

    • Ruhr-University Bochum
    • Ruhr University Bochum, Institute for Theoretical Electrical Engineering

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