Plasma Diagnostics III

Presentations

• Inductively-coupled plasmas in pure Cl, Oand mixtures: measurements of atoms, Cl$_{\mathrm{x}}$O$_{\mathrm{y}}$and electron densities

  ORAL

  Nov. 5, 2014, 3:30 PM – Nov. 5, 2014, 3:45 PM

  Authors

  • Micka\"el Foucher

    • LPP-CNRS UMR 7648

  • Emile Carbone

    • CEA grenoble
    • CEA grnoble

  • Jean-Paul Booth

    • LPP-CNRS UMR 7648

  • Pascal Chabert

    • Laboratoire de Physique des Plasmas
    • LPP-CNRS UMR 7648

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• Time evolution of spatial RF field profiles in a 100 MHz reactor

  ORAL

  Nov. 5, 2014, 3:45 PM – Nov. 5, 2014, 4:00 PM

  Authors

  • Barton Lane

    • Tokyo Electron America

  • Ikuo Sawada

    • Retired

  • Peter Ventzek

    • Tokyo Electron America

  • Colin Campbell

    • Tokyo Electron America

  • Akira Koshiishi

    • Tokyo Electron Miyagi Ltd.
    • Tokyo Electron Miyagi

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• Low pressure characteristics of the multipole resonance probe

  ORAL

  Nov. 5, 2014, 4:00 PM – Nov. 5, 2014, 4:15 PM

  Authors

  • Ralf Peter Brinkmann

    • Ruhr-University Bochum

  • Jens Oberrath

    • Ruhr-University Bochum

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• Diagnostics of Rotational Temperature and Mean Electron Energy Distribution of DC Glow Discharge Using Spectral Image Processing

  ORAL

  Nov. 5, 2014, 4:15 PM – Nov. 5, 2014, 4:30 PM

  Authors

  • Daisuke Shimizu

    • Fukuoka University

  • Ryo Sasamoto

    • Fukuoka University

  • Takao Matsumoto

    • Fukuoka University

  • Yasuji Izawa

    • Fukuoka University

  • Kiyoto Nishijima

    • Fukuoka University

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• Laser Induced Fluorescence of the Iodine Ion

  ORAL

  Nov. 5, 2014, 4:30 PM – Nov. 5, 2014, 4:45 PM

  Authors

  • William Hargus

    • Air Force Research Laboratory, Edwards AFB, CA

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• Picosecond-TALIF measurements of atomic oxygen in RF driven atmospheric pressure plasma jets

  ORAL

  Nov. 5, 2014, 4:45 PM – Nov. 5, 2014, 5:00 PM

  Authors

  • Jerome Bredin

    • York Plasma Institute, University of York

  • James Dedrick

    • York Plasma Institute, University of York

  • Kari Niemi

    • York Plasma Institute, University of York

  • Andrew West

    • York Plasma Institute, University of York

  • Eric Wagenaars

    • York Plasma Institute, University of York

  • Timo Gans

    • York Plasma Institute, University of York

  • Deborah O'Connell

    • York Plasma Institute, University of York

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• Spectroscopic diagnostics of dusty plasmas

  ORAL

  Nov. 5, 2014, 5:00 PM – Nov. 5, 2014, 5:15 PM

  Authors

  • Karim Ouaras

    • LSPM - CNRS

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• Resonance Frequencies of Curling Probe in Plasma: Surface Wave Analysis

  ORAL

  Nov. 5, 2014, 5:15 PM – Nov. 5, 2014, 5:30 PM

  Authors

  • Ali Arshadi

    • Department for Electrical Engineering and Information Sciences, Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Department for Electrical Engineering and Information Sciences, Ruhr University Bochum

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