Plasma Diagnostics II

Presentations

• Diagnostics of plasma-surface interactions in plasma processes

  COFFEE_KLATCH · Invited

  Nov. 5, 2014, 1:30 PM – Nov. 5, 2014, 2:00 PM

  Authors

  • Kenji Ishikawa

    • Nagoya University

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• Phase-modulated dispersion interferometry for electron-density determination of high-pressure plasma

  ORAL

  Nov. 5, 2014, 2:00 PM – Nov. 5, 2014, 2:15 PM

  Authors

  • Keiichiro Urabe

    • Department of Advanced Materials Science, The University of Tokyo
    • Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo
    • The University of Tokyo

  • Tsuyoshi Akiyama

    • National Institute for Fusion Science

  • Kazuo Terashima

    • The University of Tokyo

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• In-situ diagnostics and characterization of etch by-product deposition on chamber walls during halogen etching of silicon

  ORAL

  Nov. 5, 2014, 2:15 PM – Nov. 5, 2014, 2:30 PM

  Authors

  • Neema Rastgar

    • Lam Research

  • Saravanapriyan Sriraman

    • Lam Research

  • Ricky Marsh

    • Lam Research

  • Alex Paterson

    • Lam Research

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• Accurate characterization of RF antennas for low-temperature plasma discharges with non-uniform magneto-static fields

  ORAL

  Nov. 5, 2014, 2:30 PM – Nov. 5, 2014, 2:45 PM

  Authors

  • Davide Melazzi

    • University of Padova, Padova, Italy

  • Vito Lancellotti

    • Eindhoven University of Technology, Eindhoven, The Netherlands

  • Alessandro Cardinali

    • ENEA Unit\`a Tecnica Fusione, Rome, Italy

  • Marco Manente

    • T4i S.r.l., Padova, Italy

  • Daniele Pavarin

    • University of Padova, Padova, Italy
    • University of Padova

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• Electron Density Measurement of Argon Containing Plasmas by Saturation Spectroscopy

  ORAL

  Nov. 5, 2014, 2:45 PM – Nov. 5, 2014, 3:00 PM

  Authors

  • S. Nishiyama

    • Hokkaido University

  • H. Wang

    • Hokkaido University

  • S. Tomioka

    • Hokkaido University

  • K. Sasaki

    • Hokkaido University

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• OH(A,X) radicals in microwave plasma-assisted combustion of methane/air

  ORAL

  Nov. 5, 2014, 3:00 PM – Nov. 5, 2014, 3:15 PM

  Authors

  • Wei Wu

    • Mississippi State University

  • Che Fuh

    • Mississippi State University

  • Chuji Wang

    • Mississippi State University

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• Ion Flux and Energy Virtual Sensor for Measuring Ion Flux and Energy Distribution at a RF Biased Electrode in ICP Reactor (RIE-MODE)

  ORAL

  Nov. 5, 2014, 3:15 PM – Nov. 5, 2014, 3:30 PM

  Authors

  • Maria Bogdanova

    • 1 Skobeltsyn Insitute of Nuclear Physics, Moscow State University, SINP MSU, Moscow Russia; 2 Faculty of Physics, Moscow State University, MSU, Moscow

  • Dmitriy Lopaev

    • Skobeltsyn Insitute of Nuclear Physics, Moscow State University, SINP MSU, Moscow Russia

  • Sergey Zyryanov

    • 1 Skobeltsyn Insitute of Nuclear Physics, Moscow State University, SINP MSU, Moscow Russia; 2 Faculty of Physics, Moscow State University, MSU, Moscow
    • Nuclear Physics Institute, Moscow State University, Moscow, Russia

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