Transport Parameters of $F^{(-)}$ Ions in Mixtures Ar/B$F_3$

POSTER

Abstract

Transport parameters of $F^{(-)}$ ions in mixtures Ar/B$F_3$ in DC fields were calculated by using Monte Carlo simulation technique. The scattering cross-section set for $F^{(-)}$ in B$F_3$ is assembled on the basis of Nanbu's technique separating elastic from reactive collisions. In this work we present transport coefficients for the conditions of low and moderate reduced electric fields E/N (E-electric field, N-gas density) accounting for the non-conservative collisions. This mixture is usual in plasma etching applications.

*Results obtained in the Laboratory of Gaseous Electronics Institute of Physics University of Belgrade under the auspices of the Ministry of Education, Science and Technology, Projects No. 171037 and 410011.

Authors

  • Zeljka Nikitovic

    • Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade

  • Vladimir Stojanovic

    • Institute of Physics, University of Belgrade
    • Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia
    • Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade

  • Zoran Raspopovic

    • Institute of Physics, University of Belgrade
    • Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia
    • Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade

  • Jasmina Jovanovic

    • Faculty of Mechanical Engineering, University of Belgrade
    • Faculty of Mechanical Engineering, University of Belgrade, Kraljice Marije 16, 11000 Belgrade, Serbia

  • Zoran Lj. Petrovic

    • Institute of Physics, University of Belgrade
    • Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia
    • Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade