Capacitive Discharges - Computational

Presentations

• Tailoring plasma properties through the non-linear frequency coupling of odd harmonics

  ORAL

  Nov. 4, 2014, 3:30 PM – Nov. 4, 2014, 3:45 PM

  Authors

  • Andrew Gibson

    • Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN

  • Arthur Greb

    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD

  • William Graham

    • Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN

  • Timo Gans

    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD

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• Particle-in-cell Monte Carlo collision simulation of a capacitively coupled discharge in oxygen

  ORAL

  Nov. 4, 2014, 3:45 PM – Nov. 4, 2014, 4:00 PM

  Authors

  • Jon Tomas Gudmundsson

    • University of Iceland
    • Science Institute, University of Iceland

  • M.A. Lieberman

    • Univ of California - Berkeley
    • Department of Electrical Engineering and Computer Sciences, University of California at Berkeley

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• Electron beam formation and resonance phenomena in low pressure capacitive rf plasmas

  ORAL

  Nov. 4, 2014, 4:00 PM – Nov. 4, 2014, 4:15 PM

  Authors

  • Sebastian Wilczek

    • Ruhr University Bochum

  • Jan Trieschmann

    • Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Ruhr University Bochum

  • Thomas Mussenbrock

    • Ruhr University Bochum

  • Edmund Sch\"ungel

    • West Virginia University, Morgantown

  • Julian Schulze

    • West Virginia University, Morgantown

  • Aranka Derzsi

    • Wigner Research Center for Physics, Budapest

  • Ihor Korolov

    • Wigner Research Center for Physics, Budapest

  • Zolt\'an Donk\'o

    • Wigner Research Center for Physics, Budapest

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• Efficient Modelling of Pulsing CCP Reactors

  ORAL

  Nov. 4, 2014, 4:15 PM – Nov. 4, 2014, 4:30 PM

  Authors

  • Schabnam Naggary

    • Ruhr-University Bochum, Institute for Theoretical Electrical Engineering

  • Frank Atteln

    • Ruhr-University Bochum, Institute for Theoretical Electrical Engineering

  • Ralf Peter Brinkmann

    • Ruhr-University Bochum, Institute for Theoretical Electrical Engineering

  • Mustafa Megahed

    • ESI Group

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• Capacitively Coupled Plasma Modeling at Low and Moderately High Pressures

  COFFEE_KLATCH · Invited

  Nov. 4, 2014, 4:30 PM – Nov. 4, 2014, 5:00 PM

  Authors

  • Kallol Bera

    • Applied Materials, Inc.

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• The effect of ambipolar electric fields on the electron heating in capacitive RF plasmas

  ORAL

  Nov. 4, 2014, 5:00 PM – Nov. 4, 2014, 5:15 PM

  Authors

  • Julian Schulze

    • West Virginia University
    • Department of Physics, West Virginia University

  • Zoltan Donko

    • Hungarian Academy of Sciences

  • Aranka Derzsi

    • Hungarian Academy of Sciences

  • Ihor Korolov

    • Hungarian Academy of Sciences

  • Edmund Schuengel

    • Department of Physics, West Virginia University

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• A Simplified Model of The Electrical Asymmetry Effect

  ORAL

  Nov. 4, 2014, 5:15 PM – Nov. 4, 2014, 5:30 PM

  Authors

  • Douglas Keil

    • Lam Research Corporation
    • Lam Research

  • Edward Augustyniak

    • Lam Research Corporation

  • Yukinori Sakiyama

    • Lam Research Corporation

  • Pavel Ni

    • Lam Research Corporation

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