Polymerizable Supramolecular Sensor for Plasma Diagnostics on Wafer Level

Low temperature reactive plasma allows fabrication of high quality nano-device owing to the synergy effect of the plasma, especially ions impinging on the wafer. We have developed a large area wafer-type plasma diagnostic system based on the polymerizable supramolecular sensor (PSS) that affords colorimetric and fluorometric monitoring of spatial ion density distribution. The PSS system does not require electric circuits or batteries and is found to be very sensitive to the plasma and allows efficient mapping of the ion density distribution. The readily available and conceptually new method should find great utility in the field of plasma diagnostics.