Magnetically Enhanced Plasmas

Presentations

• Plasma regimes in high power pulsed magnetron sputtering

  COFFEE_KLATCH · Invited

  Oct. 3, 2013, 3:30 PM – Oct. 3, 2013, 4:00 PM

  Authors

  • Teresa Delosarcos

    • Ruhr-Universit\"at Bochum
    • Ruhr University

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• Sensitivity analysis via kinetic global modeling of rotating spokes in HiPIMS

  ORAL

  Oct. 3, 2013, 4:00 PM – Oct. 3, 2013, 4:15 PM

  Authors

  • Sara Gallian

    • Ruhr University Bochum

  • Jan Trieschmann

    • Ruhr University Bochum

  • Thomas Mussenbrock

    • Ruhr University Bochum

  • William N.G. Hitchon

    • University of Wisconsin-Madison

  • Ralf Peter Brinkmann

    • Ruhr University Bochum

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• Kinetic simulation of neutral particle transport in sputtering processes

  ORAL

  Oct. 3, 2013, 4:15 PM – Oct. 3, 2013, 4:30 PM

  Authors

  • Jan Trieschmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Sara Gallian

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Thomas Mussenbrock

    • Institute of Theoretical Electrical Engineering, Ruhr University Bochum

  • Stefan Ries

    • Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum

  • Nikita Bibinov

    • Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum

  • Peter Awakowicz

    • Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum

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• Effect of anomalous electron cross-field transport on electron energy distribution function in a DC-RF magnetized plasma discharge

  ORAL

  Oct. 3, 2013, 4:30 PM – Oct. 3, 2013, 4:45 PM

  Authors

  • Yevgeny Raitses

    • Princeton Plasma Physics Laboratory, Princeton, NJ
    • Princeton Plasma Physics Laboratory
    • Princeton Plasma Physics Laboratory, Princeton, New Jersey 08543, USA
    • PPPL
    • PPPL, Princeton, NJ

  • Vincent Donnelly

    • University of Houston, Houston, TX

  • Igor Kaganovich

    • Princeton Plasma Physics Laboratory, Princeton, NJ

  • Valery Godyak

    • University of Michigan, Ann Arbor, MI

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• Proof of principle experiments for helicon discharges in hydrogen

  ORAL

  Oct. 3, 2013, 4:45 PM – Oct. 3, 2013, 5:00 PM

  Authors

  • Stefan Briefi

    • Max-Planck-Institut f\"ur Plasmaphysik, EURATOM-Assoziation, Boltzmannstr. 2, 85748 Garching, Germany

  • Ursel Fantz

    • Max-Planck-Institut f\"ur Plasmaphysik, EURATOM-Assoziation, Boltzmannstr. 2, 85748 Garching, Germany
    • Max-Planck-Instiut fuer Plasmaphysik, EURATOM Association, Boltzmannstr. 2, 85748 Garching, Germany
    • Max-Planck-Institut fuer Plasmaphysik, EURATOM Association, Boltzmannstr. 2, 85748 Garching, Germany

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