Capacitively Coupled Plasmas II

Presentations

• Electron heating in capacitively coupled plasmas revisited: single and multi-frequency discharges

  COFFEE_KLATCH · Invited

  Oct. 3, 2013, 3:30 PM – Oct. 3, 2013, 4:00 PM

  Authors

  • Trevor Lafleur

    • LPP-CNRS, Ecole Polytechnique

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• Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

  ORAL

  Oct. 3, 2013, 4:00 PM – Oct. 3, 2013, 4:15 PM

  Authors

  • Julian Schulze

    • Ruhr-University Bochum

  • Aranka Derzsi

    • Hungarian Academy of Sciences

  • Ihor Korolov

    • Hungarian Academy of Sciences

  • Edmund Schuengel

    • Ruhr-University Bochum

  • Zoltan Donko

    • Hungarian Academy of Sciences

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• Student Award Finalist - The role of surface properties in the dynamics of radio-frequency plasma sheaths: measurements and simulations

  ORAL

  Oct. 3, 2013, 4:15 PM – Oct. 3, 2013, 4:30 PM

  Authors

  • Arthur Greb

    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

  • Andrew Gibson

    • Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, UK
    • Centre for Plasma Physics, Queen's University Belfast, UK
    • Centre for Plasma Physics, Queen's University Belfast

  • Kari Niemi

    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK
    • York Plasma Institute, University of York, Heslington York, UK

  • Deborah O'Connell

    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK
    • York Plasma Institute, University of York, UK
    • York Plasma Institute, University of York, Heslington York, UK

  • Timo Gans

    • York Plasma Institute, University of York, UK
    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK
    • University of York
    • York Plasma Institute, University of York, Heslington York, UK

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• An Analytical Model for the Radio-Frequency Sheath

  ORAL

  Oct. 3, 2013, 4:30 PM – Oct. 3, 2013, 4:45 PM

  Authors

  • Uwe Czarnetzki

    • Ruhr-University Bochum, Faculty for Physics and Astronomy
    • Ruhr-University Bochum

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• Transient plasma parameters in pulsed RF CCP discharges

  ORAL

  Oct. 3, 2013, 4:45 PM – Oct. 3, 2013, 5:00 PM

  Authors

  • Theresa Kummerer

    • NC State University

  • David Coumou

    • MKS Instruments

  • Steven Shannon

    • NC State University
    • North Carolina State University

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