Capacitively Coupled Plasmas I

Presentations

• IEDF Skew Control Using Phase Locked Dual Frequency RF Drive

  ORAL

  Oct. 3, 2013, 1:30 PM – Oct. 3, 2013, 1:45 PM

  Authors

  • Hamilton Clark

    • NC State University

  • Theresa Kummerer

    • NC State University

  • David Coumou

    • MKS Instruments

  • Steven Shannon

    • NC State University
    • North Carolina State University

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• Evaluation of Equivalent Circuit Models for Plasma Bulk Characterization by Comparing IEDF Predictions with those of a Spatially Resolved CCP Model

  ORAL

  Oct. 3, 2013, 1:45 PM – Oct. 3, 2013, 2:00 PM

  Authors

  • Schabnam Naggary

    • Ruhr University Bochum

  • Mohammed Shihab

    • Ruhr University Bochum

  • Frank Atteln

    • Ruhr University Bochum

  • Mustafa Megahed

    • ESI Group
    • ESI US R\&D Inc

  • Ralf Peter Brinkmann

    • Ruhr University Bochum

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• A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge

  ORAL

  Oct. 3, 2013, 2:00 PM – Oct. 3, 2013, 2:15 PM

  Authors

  • Jon T. Gudmundsson

    • University of Iceland
    • Science Institute, University of Iceland

  • Shuo Huang

    • University of Michigan - Shanghai Jiao Tong University Joint Institute, Shanghai Jiao Tong University

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• Numerical Confirmation of the Feasibility to Generate Uniform Large-Area VHF Plasmas by Launching a Travelling Wave

  ORAL

  Oct. 3, 2013, 2:15 PM – Oct. 3, 2013, 2:30 PM

  Authors

  • Hsin-Liang Chen

    • Physics Division, Institute of Nuclear Energy Research (INER)

  • Yen-Cheng Tu

    • Physics Division, Institute of Nuclear Energy Research (INER)

  • Cheng-Chang Hsieh

    • Physics Division, Institute of Nuclear Energy Research (INER)

  • Wen-Fa Tsai

    • Physics Division, Institute of Nuclear Energy Research (INER)

  • Chi-Fong Ai

    • Physics Division, Institute of Nuclear Energy Research (INER)

  • Keh-Chyang Leou

    • Department of Engineering and System Science, National Tsing Hua University

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• Higher harmonic waves and a center-peaked plasma density profile in VHF-CCP reactors

  ORAL

  Oct. 3, 2013, 2:30 PM – Oct. 3, 2013, 2:45 PM

  Authors

  • Ikuo Sawada

    • Tokyo Electron US Holdings Inc.

  • Barton Lane

    • Tokyo Electron America

  • Peter Ventzek

    • Tokyo Electron America

  • Rochan Upadhay

    • Esgee Technologies Inc.

  • Laxminarayan Raja

    • University of Texas at Austin

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• Observation of an abrupt electron heating mode transition in capacitive single radio frequency discharges

  ORAL

  Oct. 3, 2013, 2:45 PM – Oct. 3, 2013, 3:00 PM

  Authors

  • Sebastian Wilczek

    • Ruhr University Bochum

  • Jan Trieschmann

    • Ruhr University Bochum

  • Julian Schulze

    • Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Ruhr University Bochum

  • Thomas Mussenbrock

    • Ruhr University Bochum

  • Aranka Derzsi

    • Wigner Research Center for Physics, Budapest

  • Ihor Korolov

    • Wigner Research Center for Physics, Budapest

  • Zoltan Donk\'o

    • Wigner Research Center for Physics, Budapest

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