Inductively Coupled Plasmas

Presentations

• ICP Source with Immersed Ferromagnetic Inductor

  ORAL

  Oct. 2, 2013, 1:30 PM – Oct. 2, 2013, 1:45 PM

  Authors

  • Valery Godyak

    • RF Plasma Consulting

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• Three-coil inductively coupled plasma (ICP) source with individually controlled coil currents supplied from a single power generator

  ORAL

  Oct. 2, 2013, 1:45 PM – Oct. 2, 2013, 2:00 PM

  Authors

  • Leonid Dorf

    • Applied Materials

  • Shahid Rauf

    • Applied Materials

  • Jonathan Liu

    • Applied Materials

  • Jason Kenney

    • Applied Materials

  • Steven Lane

    • Applied Materials

  • Andrew Nguyen

    • Applied Materials

  • Kartik Ramaswamy

    • Applied Materials

  • Ken Collins

    • Applied Materials

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• Synergistic Behavior of a Dual Tandem Plasma Source

  ORAL

  Oct. 2, 2013, 2:00 PM – Oct. 2, 2013, 2:15 PM

  Authors

  • Lei Liu

    • University of Houston

  • Weiye Zhu

    • University of Houston

  • Shyam Sridhar

    • University of Houston

  • Vincent Donnelly

    • University of Houston

  • Demetre Economou

    • University of Houston

  • Michael Logue

    • University of Michigan

  • Mark Kushner

    • University of Michigan

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• Large and powerful RF-driven hydrogen ion sources

  ORAL

  Oct. 2, 2013, 2:15 PM – Oct. 2, 2013, 2:30 PM

  Authors

  • Ursel Fantz

    • Max-Planck-Institut f\"ur Plasmaphysik, EURATOM-Assoziation, Boltzmannstr. 2, 85748 Garching, Germany
    • Max-Planck-Instiut fuer Plasmaphysik, EURATOM Association, Boltzmannstr. 2, 85748 Garching, Germany
    • Max-Planck-Institut fuer Plasmaphysik, EURATOM Association, Boltzmannstr. 2, 85748 Garching, Germany

  • Peter Franzen

    • Max-Planck-Instiut fuer Plasmaphysik, EURATOM Association, Boltzmannstr. 2, 85748 Garching, Germany

  • Bernd Heinemann

    • Max-Planck-Instiut fuer Plasmaphysik, EURATOM Association, Boltzmannstr. 2, 85748 Garching, Germany

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• Measurements of collisionless heating effects in the H-mode of an inductively coupled plasma system

  ORAL

  Oct. 2, 2013, 2:30 PM – Oct. 2, 2013, 2:45 PM

  Authors

  • Mujahid Zaka-ul-Islam

    • Physics Department, Faculty of Science, Jazan University, Jazan, 2079, Saudi Arabia

  • W.G. Graham

    • Centre for Plasma Physics, Queen's University Belfast, UK
    • Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7
    • Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, UK
    • Queen's University Belfast, UK
    • Queens University Belfast, UK
    • Centre for Plasma Physics, Queens University of Belfast
    • Queen's University, Belfast

  • Timo Gans

    • York Plasma Institute, University of York, UK
    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK
    • University of York
    • York Plasma Institute, University of York, Heslington York, UK

  • Kari Niemi

    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK
    • York Plasma Institute, University of York, Heslington York, UK

  • Deborah O'Connell

    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK
    • York Plasma Institute, University of York, UK
    • York Plasma Institute, University of York, Heslington York, UK

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