Plasma Deposition and Photovoltaic Applications

Presentations

• Investigation of high power impulse magnetron sputtering (HIPIMS) discharge using fast ICCD camera

  COFFEE_KLATCH · Invited

  Oct. 26, 2012, 9:00 AM – Oct. 26, 2012, 9:30 AM

  Authors

  • Ante Hecimovic

    • Research Department Plasmas with Complex Interactions, Institute for Experimental Physics II, Ruhr-Universit\"at Bochum, Germany

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• Reactive high power impulse magnetron sputtering

  ORAL

  Oct. 26, 2012, 9:30 AM – Oct. 26, 2012, 9:45 AM

  Authors

  • J.T. Gudmundsson

    • Shanghai Jiao Tong University

  • F. Magnus

    • Uppsala University, Sweden

  • T.K. Tryggvason

    • Science Institute, University of Iceland

  • O.B. Sveinsson

    • Science Institute, University of Iceland

  • S. Olafsson

    • Science Institute, University of Iceland

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• Control Capabilities of Reactive Sputter Deposition Process via ICPs Driven by Low-Inductance Antenna for Large-Area Formation of Thin Film Devices

  ORAL

  Oct. 26, 2012, 9:45 AM – Oct. 26, 2012, 10:00 AM

  Authors

  • Yuichi Setsuhara

    • Joining and Welding Research Institute, Osaka University

  • Kosuke Takenaka

    • Joining and Welding Research Institute, Osaka University

  • Akinori Ebe

    • EMD Corporation

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• Source gas depletion in narrow metal tube during internal DLC coating with microwave-excited high-density near plasma

  ORAL

  Oct. 26, 2012, 10:00 AM – Oct. 26, 2012, 10:15 AM

  Authors

  • Ryosuke Matsui

    • Department of Mechanical Science and Engineering, Graduate School of Engineerig, Nagoya University

  • Hiroyuki Kousaka

    • Department of Mechanical Science and Engineering, Graduate School of Engineerig, Nagoya University
    • Graduate School of Engineering, Nagoya University

  • Noritsugu Umehara

    • Department of Mechanical Science and Engineering, Graduate School of Engineerig, Nagoya University

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• Fabrication of graphene-based films using remote plasma CVD

  ORAL

  Oct. 26, 2012, 10:15 AM – Oct. 26, 2012, 10:30 AM

  Authors

  • Mineo Hiramatsu

    • Meijo University

  • Ryosuke Tsukada

    • Meijo University

  • Yohei Kashima

    • Meijo University

  • Masateru Naito

    • Meijo University

  • Hiroki Kondo

    • Nagoya University

  • Masaru Hori

    • Nagoya University

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• A plasma-enhanced close-spacing sublimation (PECSS) device for photovoltaic thin-film modification

  ORAL

  Oct. 26, 2012, 10:30 AM – Oct. 26, 2012, 10:45 AM

  Authors

  • Garrett Metz

    • Colorado State University - Department of Mechanical Engineering

  • Len Mahoney

    • Colorado State University Faculty Affiliate

  • John Williams

    • Colorado State University - Department of Mechanical Engineering

  • Drew Swanson

    • Colorado State University - Department of Mechanical Engineering

  • Walajabad Sampath

    • Colorado State University - Department of Mechanical Engineering

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• Investigations of capacitively coupled radio frequency hydrogen and hydrogen/silane discharges

  ORAL

  Oct. 26, 2012, 10:45 AM – Oct. 26, 2012, 11:00 AM

  Authors

  • Sebastian Mohr

    • Ruhr-University Bochum

  • Edmund Sch\"ungel

    • Ruhr-University Bochum

  • Julian Schulze

    • Ruhr-University Bochum

  • Uwe Czarnetzki

    • Ruhr-University Bochum

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