Plasma Etching I

Presentations

• Time-Multiplexed Deep Silicon Etching

  COFFEE_KLATCH · Invited

  Oct. 24, 2012, 8:00 AM – Oct. 24, 2012, 8:30 AM

  Authors

  • Larry Overzet

    • The University of Texas at Dallas
    • University of Texas at Dallas

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• Formation Mechanisms of Surface Roughening and Rippling during Plasma Etching and Sputtering of Silicon

  ORAL

  Oct. 24, 2012, 8:30 AM – Oct. 24, 2012, 8:45 AM

  Authors

  • Hirotaka Tsuda

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

  • Yoshinori Takao

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

  • Koji Eriguchi

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

  • Kouichi Ono

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

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• Ion Energy Distribution Control Using Ion Mass Ratios in Inductively Coupled Plasmas With a Pulsed DC Bias on the Substrate

  ORAL

  Oct. 24, 2012, 8:45 AM – Oct. 24, 2012, 9:00 AM

  Authors

  • Michael D. Logue

    • University of Michigan

  • Mark J. Kushner

    • University of Michigan

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• Multi-scale approach for simulation of deep silicon etching under ICP SF6/Ar plasma mixture

  ORAL

  Oct. 24, 2012, 9:00 AM – Oct. 24, 2012, 9:15 AM

  Authors

  • Amand Pateau

    • Institut des Materiaux Jean Rouxel - University of Nantes

  • Ahmed Rhallabi

    • Institut des Materiaux (IMN) - University of Nantes
    • Institut des Materiaux Jean Rouxel - University of Nantes

  • Marie Claude Fernandez

    • Institut des Materiaux (IMN) - University of Nantes
    • Institut des Materiaux Jean Rouxel - University of Nantes

  • Fabrice Roqueta

    • ST Microelectronics Tours

  • Mohamed Boufnichel

    • ST Microelectronics Tours

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• Molecular Dynamics Analysis of Physical and Chemical Behavior of Etch Products Desorbed during Si Etching in Cl- and Br-based Plasmas

  ORAL

  Oct. 24, 2012, 9:15 AM – Oct. 24, 2012, 9:30 AM

  Authors

  • Nobuya Nakazaki

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

  • Yoshinori Takao

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

  • Koji Eriguchi

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

  • Kouichi Ono

    • Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University

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