Plasma Modeling and Simulations I

Presentations

• Simulations of Plasma Sources for Semiconductor Device Manufacturing

  COFFEE_KLATCH · Invited

  Oct. 23, 2012, 3:30 PM – Oct. 23, 2012, 4:00 PM

  Authors

  • Peter Ventzek

    • Tokyo Electron America

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• ABSTRACT WITHDRAWN

  Oct. 23, 2012, 4:00 PM – Oct. 23, 2012, 4:15 PM

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• The effect of frequency-dependent electron swarm parameters on fluid modeling of high-frequency CCP discharges

  ORAL

  Oct. 23, 2012, 4:15 PM – Oct. 23, 2012, 4:30 PM

  Authors

  • Rochan Upadhyay

    • Esgee Technologies Inc.

  • Shankar Mahadevan

    • Esgee Technologies Inc.

  • Ikuo Sawada

    • Tokyo Electron Limited
    • Tokyo Electron US Holdings Inc.

  • Mirko Vukovic

    • Tokyo Electron Limited
    • Tokyo Electron, US Holdings

  • Peter Ventzek

    • Tokyo Electron Limited

  • Laxminarayan Raja

    • University of Texas, Austin
    • University of Texas at Austin
    • The University of Texas at Austin

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• Two-Dimensional (z-$\theta$) Hybrid Fluid-PIC Simulation of Enhanced Cross-field Electron Transport in an Annular \textit{E}$\times$\textit{B} Discharge

  ORAL

  Oct. 23, 2012, 4:30 PM – Oct. 23, 2012, 4:45 PM

  Authors

  • Cheryl Lam

    • Stanford University

  • Eduardo Fernandez

    • Eckerd College

  • Mark Cappelli

    • Stanford University

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• A new approach for the determination of electron transport coefficients

  ORAL

  Oct. 23, 2012, 4:45 PM – Oct. 23, 2012, 5:00 PM

  Authors

  • Markus M. Becker

    • INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

  • Detlef Loffhagen

    • INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany

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• Comparison of a Global Model to Semi-Kinetic Fluid Simulations for Atmospheric Pressure Radio- Frequency Capacitive Discharges

  ORAL

  Oct. 23, 2012, 5:00 PM – Oct. 23, 2012, 5:15 PM

  Authors

  • Kari Niemi

    • University of York
    • York Plasma Institute, University of York, YO10 5DD, York, UK
    • York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK

  • Deborah O'Connell

    • University of York
    • York Plasma Institute, University of York, YO10 5DD, York, UK
    • York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK

  • Timo Gans

    • University of York
    • York Plasma Institute, University of York, YO10 5DD, York, UK
    • York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK

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• Analytical Model for the Microwave Driven Double ICP Plasma Jet

  ORAL

  Oct. 23, 2012, 5:15 PM – Oct. 23, 2012, 5:30 PM

  Authors

  • Ali Arshadi

    • Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany

  • Denis Eremin

    • Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany

  • Thomas Mussenbrock

    • Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany

  • Ralf Peter Brinkmann

    • Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany

  • Peter Awakowicz

    • General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany

  • Horia-Eugen Porteanu

    • Ferdinand-Braun-Institut, Berlin, Germany

  • Roland Gesche

    • Ferdinand-Braun-Institut, Berlin, Germany

  • Klaus Wandel

    • SENTECH Instruments GmbH, Berlin, Germany

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