Ion Distribution Functions
FOCUS · ET4 ·
Presentations
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2D ion velocity distribution function measurements by laser-induced fluorescence above a radio-frequency biased silicon wafer
ORAL
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Authors
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Nathaniel Moore
- UCLA-Dept. Physics
- UCLA Department of Physics
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Walter Gekelman
- UCLA Department of Physics
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Patrick Pribyl
- UCLA Department of Physics
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Yiting Zhang
- Electrical Engineering and Computer Science, U. Michigan
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Mark Kushner
- Electrical Engineering and Computer Science, U. Michigan
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Space and Phase Resolved Modeling of Ion Energy Angular-Distributions from the Bulk Plasma to the Wafer in Dual Frequency Capacitively Coupled Plasmas
ORAL
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Authors
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Yiting Zhang
- University of Michigan
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Nathaniel Moore
- UCLA-Dept. Physics
- UCLA Department of Physics
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Patrick Pribyl
- UCLA-Dept. Physics
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Walter Gekelman
- UCLA-Dept. Physics
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Mark J. Kushner
- University of Michigan
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Ion energy distributions at the electrodes of high pressure capacitive dual-frequency hydrogen discharges
ORAL
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Authors
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Edmund Sch\"ungel
- Ruhr-University Bochum
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Sebastian Mohr
- Ruhr-University Bochum
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Julian Schulze
- Ruhr-University Bochum
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Uwe Czarnetzki
- Ruhr-University Bochum
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High Energy IED measurements with MEMs based Si grid technology inside a 300mm Si wafer
COFFEE_KLATCH · Invited
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Authors
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Merritt Funk
- Tokyo Electron
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Single and multi-point ion energy distributions in a VHF+RF commercial plasma reactor measured by novel in-wafer ion energy analyzer
ORAL
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Authors
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Barton Lane
- Tokyo Electron America
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Merritt Funk
- Tokyo Electron America
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Lee Chen
- Tokyo Electron America
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Radha Sundararajan
- Tokyo Electron America
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Jianping Zhao
- Tokyo Electron America
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