Inductively Coupled Plasmas

Presentations

• Ferromagnetic Enhanced Inductive Plasma Sources

  COFFEE_KLATCH · Invited

  Oct. 23, 2012, 1:30 PM – Oct. 23, 2012, 2:00 PM

  Authors

  • Valery Godyak

    • University of Michigan and RF Plasma Consulting

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• High Pressure Discharge Negative Ion Source

  ORAL

  Oct. 23, 2012, 2:00 PM – Oct. 23, 2012, 2:15 PM

  Authors

  • Lynn Olson

    • Busek Co. Inc.
    • Busek Co., Inc.

  • John Blandino

    • Worcester Polytechnic Institute

  • Nikolaos Gatsonis

    • Worcester Polytechnic Institute

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• Three-Dimensional Electromagnetic Plasma Modeling of Inductively Coupled Plasma Source and Antenna

  ORAL

  Oct. 23, 2012, 2:15 PM – Oct. 23, 2012, 2:30 PM

  Authors

  • Shahid Rauf

    • Applied Materials, Inc.

  • Ankur Agarwal

    • Applied Materials, Inc.

  • Jason Kenney

    • Applied Materials, Inc.

  • Ming-Feng Wu

    • Applied Materials, Inc.

  • Ken Collins

    • Applied Materials, Inc.

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• Evidence of weak plasma series resonance heating in the H-mode of neon and neon/argon inductively coupled plasmas

  ORAL

  Oct. 23, 2012, 2:30 PM – Oct. 23, 2012, 2:45 PM

  Authors

  • A.E. Wendt

    • University of Wisconsin - Madison

  • John B. Boffard

    • University of Wisconsin - Madison

  • R.O. Jung

    • University of Wisconsin - Madison

  • Chun C. Lin

    • University of Wisconsin - Madison

  • L.E. Aneskavich

    • University of Wisconsin - Madison

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• Model of an Ar/O$_{2}$ inductive discharge used for plasma spray deposition

  ORAL

  Oct. 23, 2012, 2:45 PM – Oct. 23, 2012, 3:00 PM

  Authors

  • Claudia Lazzaroni

    • LSPM, CNRS UPR 3407, Universit\'e Paris 13

  • Mehrdad Nikravech

    • LSPM, CNRS UPR 3407, Universit\'e Paris 13

  • Pascal Chabert

    • LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI

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