Capacitively Coupled Plasmas

Presentations

• Plasma characteristics in non-sinusoidally excited CCP discharges

  ORAL

  Oct. 23, 2012, 10:00 AM – Oct. 23, 2012, 10:15 AM

  Authors

  • Trevor Lafleur

    • LPP-CNRS, Ecole Polytechnique, France
    • LPP Ecole Polytechnique

  • Jean-Paul Booth

    • LPP-CNRS, Ecole Polytechnique, France
    • LPP Ecole Polytechnique

  View abstract →

• Tailored Voltage Waveform Capacitively-Coupled Plasmas

  ORAL

  Oct. 23, 2012, 10:15 AM – Oct. 23, 2012, 10:30 AM

  Authors

  • Jean-Paul Booth

    • LPP-CNRS, Ecole Polytechnique, France
    • LPP Ecole Polytechnique

  • Trevor Lafleur

    • LPP-CNRS, Ecole Polytechnique, France
    • LPP Ecole Polytechnique

  • Pierre-Alexandre Delattre

    • LPP-CNRS, Ecole Polytechnique, France

  • Erik Johnson

    • PICM-CNRS, Ecole Polytechnique, France

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• A numerical analysis of plasma non-uniformity in the parallel plate VHF-CCP and the comparison among various model

  ORAL

  Oct. 23, 2012, 10:30 AM – Oct. 23, 2012, 10:45 AM

  Authors

  • Ikuo Sawada

    • Tokyo Electron Limited
    • Tokyo Electron US Holdings Inc.

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• Extension of CCP DC Self Bias Models To The Case of Fractional Diversion of Powered Electrode Current to Ground

  ORAL

  Oct. 23, 2012, 10:45 AM – Oct. 23, 2012, 11:00 AM

  Authors

  • D.L. Keil

    • Lam Research Corp.

  • E. Augustyniak

    • Lam Research Corp.

  • E. Dorai

    • Lam Research Corp.

  • F. Galli

    • Lam Research Corp.

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• Analysis of the phase controlled capacitively coupled plasma using triode circuit model

  ORAL

  Oct. 23, 2012, 11:00 AM – Oct. 23, 2012, 11:15 AM

  Authors

  • Myung-Sun Choi

    • Department of Energy System (Nuclear) Engineering, Seoul National University

  • Seok-Hwan Lee

    • Department of Energy System (Nuclear) Engineering, Seoul National University

  • Gon-Ho Kim

    • Department of Energy System (Nuclear) Engineering, Seoul National University

  • Dougyong Sung

    • Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd.

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• The effect of the driving frequencies on the Electrical Asymmetry Effect in dual-frequency capacitive radio frequency plasmas

  ORAL

  Oct. 23, 2012, 11:15 AM – Oct. 23, 2012, 11:30 AM

  Authors

  • Julian Schulze

    • Ruhr University Bochum
    • Inst. for Plasma and Atomic Physics, Ruhr-University Bochum
    • Ruhr-University Bochum

  • Ihor Korolov

    • Hungarian Academy of Sciences

  • Uwe Czarnetzki

    • Ruhr-University Bochum

  • Zoltan Donko

    • Hungarian Academy of Sciences

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• Electromagnetic Particle-in-Cell Simulation of Large Area High-Frequency Capacitive Coupled Plasmas for the Reduction of Standing Wave Effects

  ORAL

  Oct. 23, 2012, 11:30 AM – Oct. 23, 2012, 11:45 AM

  Authors

  • Jin Seok Kim

    • Pusan National University

  • In Cheol Song

    • Pusan National University

  • Seok Won Hwang

    • Pusan National University

  • Ho-Jun Lee

    • Pusan National University

  • Hae June Lee

    • Pusan National University

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• Electric fields measurements in the collisional RF plasma pre-sheath during microgravity conditions

  POSTER

  Oct. 23, 2012, 11:45 AM – Oct. 23, 2012, 12:00 PM

  Authors

  • Job Beckers

    • Eindhoven University of Technology

  • Dirk Trienekens

    • Eindhoven University of Technology

  • Gerrit Kroesen

    • Eindhoven University of Technology

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