Plasma Surface Interactions

Presentations

• MD simulations of hydrogen plasma interaction with graphene surfaces

  ORAL

  Oct. 23, 2012, 8:00 AM – Oct. 23, 2012, 8:15 AM

  Authors

  • David Graves

    • University of California Berkeley
    • Department of Chemical and Biomolecular Engineering, University of California, Berkeley
    • University of California at Berkeley

  • Emilie Despiau-Pujo

    • CNRS/UJF-Grenoble1/CEA LTM

  • Alexandra Davydova

    • CNRS/UJF-Grenoble1/CEA LTM

  • Gilles Cunge

    • CNRS/UJF-Grenoble1/CEA LTM

  • Laurence Magaud

    • CNRS/UJF-Grenoble 1 Institut N\'eel

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• Atomic Hydrogen Measurements in a Fusion-Relevant Plasma

  ORAL

  Oct. 23, 2012, 8:15 AM – Oct. 23, 2012, 8:30 AM

  Authors

  • Cameron Samuell

    • Australian National University

  • Cormac Corr

    • Australian National University

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• Comparison of CF$_{4}$, CHF$_{3}$ and CH$_{2}$F$_{2}$ plasmas used for wafer processing

  ORAL

  Oct. 23, 2012, 8:30 AM – Oct. 23, 2012, 8:45 AM

  Authors

  • Stefan Tinck

    • University of Antwerp

  • Alexey Milenin

    • imec Belgium

  • Annemie Bogaerts

    • University of Antwerp

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• Effect of cathode cooling efficiency and oxygen plasma gas pressure on the hafnium cathode wall temperature

  ORAL

  Oct. 23, 2012, 8:45 AM – Oct. 23, 2012, 9:00 AM

  Authors

  • Koustubh Ashtekar

    • ABB Inc.

  • Gregory Diehl

    • ESAB Welding \& Cutting Products

  • John Hamer

    • ESAB Welding \& Cutting Products

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• Ultra low-k dielectrics damage under VUV and EUV radiation

  ORAL

  Oct. 23, 2012, 9:00 AM – Oct. 23, 2012, 9:15 AM

  Authors

  • Sergey Zyryanov

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia

  • Oleg Braginsky

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia

  • Alexander Kovalev

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia

  • Dmitry Lopaev

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia

  • Yury Mankelevich

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia

  • Tatyana Rakhimova

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia

  • Alexander Rakhimov

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia

  • Anna Vasilieva

    • Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia

  • Mikhail Baklanov

    • IMEC, Leuven, Belgium

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• Plasma surface interaction in hot filament cathode arc discharge used to nitride steel substrates

  ORAL

  Oct. 23, 2012, 9:15 AM – Oct. 23, 2012, 9:30 AM

  Authors

  • R.P. Dahiya

    • Indian Institute of Techology Delhi
    • Indian Institute of Technology Delhi
    • Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India

  • O. Singh

    • Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India

  • V. Aggarwal

    • Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India

  • H.K. Malik

    • Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India

  • Nisha Kumari

    • DBCR University of Science and Technology, Murthal -131039, India

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