Plasma Modeling and Simulation

Presentations

• Finite Penetration Depth Model for 2D and 3D Simulation of Etching, Deposition, and Implantation

  ORAL

  Nov. 18, 2011, 9:30 AM – Nov. 18, 2011, 9:45 AM

  Authors

  • Paul Moroz

    • Tokyo Electron US Holdings, Inc.

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• ABSTRACT WITHDRAWN

  Nov. 18, 2011, 9:45 AM – Nov. 18, 2011, 10:00 AM

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• Particle-in-cell/Monte Carlo simulation of capacitively coupled chlorine plasmas

  ORAL

  Nov. 18, 2011, 10:00 AM – Nov. 18, 2011, 10:15 AM

  Authors

  • Kenji Matsuoka

    • Kyoto University

  • Yoshinori Takao

    • Kyoto University

  • Koji Eriguchi

    • Kyoto University

  • Kouichi Ono

    • Kyoto University

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• Global Model of Atmospheric Pressure Plasmas with Capacitively-Coupled Radio-Frequency Excitation

  ORAL

  Nov. 18, 2011, 10:15 AM – Nov. 18, 2011, 10:30 AM

  Authors

  • Kari niemi

    • Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK
    • Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Belfast BT7 1NN, Northern Ireland, UK
    • Queens University Belfast
    • Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

  • Jochen Waskoenig

    • Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Belfast BT7 1NN, Northern Ireland, UK

  • Deborah O'Connell

    • York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK
    • University of York
    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

  • Timo Gans

    • York Plasma Institute, Department of Physics, University of York, Heslington, York, YO10 5DQ, UK
    • York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK
    • University of York
    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

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• Manipulating electron dynamics and plasma chemistry in dual radio-frequency driven atmospheric pressure plasmas

  ORAL

  Nov. 18, 2011, 10:30 AM – Nov. 18, 2011, 10:45 AM

  Authors

  • Colm O'Neill

    • Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK

  • Kari niemi

    • Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK
    • Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Belfast BT7 1NN, Northern Ireland, UK
    • Queens University Belfast
    • Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

  • Jochen Waskoenig

    • Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK

  • Timo Gans

    • York Plasma Institute, Department of Physics, University of York, Heslington, York, YO10 5DQ, UK
    • York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK
    • University of York
    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

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• Modeling of Interactions between Surface properties, DC Self Bias and Plasma Stability in PECVD Tools

  ORAL

  Nov. 18, 2011, 10:45 AM – Nov. 18, 2011, 11:00 AM

  Authors

  • Federico Galli

    • Novellus Systems Inc.

  • Douglas Keil

    • Novellus Systems Inc.

  • Edward Augustyniak

    • Novellus Systems Inc.

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• SiH4-H2-Plasma Modeling of the deposition of $\mu $c-Si:H Solar Cells

  ORAL

  Nov. 18, 2011, 11:00 AM – Nov. 18, 2011, 11:15 AM

  Authors

  • Stephan Danko

    • Robert Bosch GmbH

  • Wladislaw Dobrygin

    • RUB

  • Oliver Schmidt

    • Robert Bosch GmbH

  • Ralf Peter Brinkmann

    • RUB
    • Ruhr-University Bochum
    • Ruhr-Universit\"at Bochum
    • Ruhr University

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• Modeling of an Atmospheric Pressure Helium Plasma Jet

  ORAL

  Nov. 18, 2011, 11:15 AM – Nov. 18, 2011, 11:30 AM

  Authors

  • Douglas Breden

    • University of Texas at Austin

  • Kenji Miki

    • University of Texas at Austin

  • Laxminarayan Raja

    • University of Texas at Austin

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• Symmetric multi-component diffusion modeling for Magnum PSI

  ORAL

  Nov. 18, 2011, 11:30 AM – Nov. 18, 2011, 11:45 AM

  Authors

  • Kim Peerenboom

    • Eindhoven University of Technology

  • Jan van Dijk

    • Eindhoven University of Technology

  • Wim Goedheer

    • FOM-Institute for Plasma Physics Rijnhuizen

  • Joost van der Mullen

    • Eindhoven University of Technology

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