Implement of Data Collection and Evaluation System for Plasma Chemistry

Since the characteristics of plasma depend strongly on the interactions between plasma particles, well-evaluated plasma chemistry data is needed to understand and produce various types of plasma. Therefore, many research groups have been researched for plasma chemistry with experimental or theoretical method. However, previously published data was not fully evaluated among them. In this work, therefore, we developed data collection and evaluation system for plasma chemistry, which supports well evaluated data by experties.