Plasma-surface Interactions
ORAL · PR3 ·
Presentations
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Pore Sealing vs. Surface Densification in Inhibition of O$_{2}$ Plasma Damage in Organosilicates
ORAL
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Authors
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Jeffry Kelber
- Dept. of Chemistry, University of North Texas, Denton, TX 76203
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Swayambhu Behera
- Dept. of Chemistry, University of North Texas, Denton, TX 76203
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Simulation of the dynamics of a helium discharge in a thin dielectric tube at atmospheric pressure
ORAL
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Authors
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Jaroslav Jansky
- ECP, lab EM2C, Chatenay-Malabry, France
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Francois Pechereau
- ECP, lab EM2C, Chatenay-Malabry, France
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Anne Bourdon
- ECP, lab EM2C, Chatenay-Malabry, France
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3D feature profile simulation based on realistic surface kinetic modeling of fluorocarbon plasma etch process
ORAL
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Authors
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Won-Seok Chang
- NFRI
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Deuk-Chul Kwon
- NFRI
- National Fusion Research Institute
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Dong-Hun Yu
- Kyung-won Tech
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Deog-Gyun Cho
- Chonbuk National University
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Yeong-Geun Yook
- Chonbuk National University
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Jin-Tae Kim
- Chonbuk National University
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Jung-Sik Yoon
- NFRI
- National Fusion Research Institute
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Yeon-Ho Im
- Chonbuk National University
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Optical Emission Spectroscopy Characterization of Atmospheric Pressure Plasma Removal of High Density Polyethylene
ORAL
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Authors
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Anthony McWilliams
- North Carolina State University
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Steven Shannon
- North Carolina State University
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Stephen Hudak
- North Carolina State University
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Jerry Cuomo
- North Carolina State University
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Surface Modification of PAN-based Carbon Fiber Using Single and Dual High Frequency RF-PECVD
ORAL
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Authors
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Demiral Akbar
- Karatekin University of Cankiri, Dep. of Physics, 18100, Cankiri, Turkey
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Ummugul E. Gungor
- Middle East Technical University, Dep. Of Physics, 06800, Ankara, Turkey
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Sinan Bilikmen
- Middle East Technical University, Dep. Of Physics, 06800, Ankara, Turkey
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