Rate Coefficients for Ion Production by Electrons and Ions in BF3 Gas

ORAL

Abstract

The interest in the research of the electron and ion transport phenomena in molecular gases arises from their contribution in modeling phenomena of today's advanced technologies. Rate coefficients for radical ion production in plasmas are basic modeling tool to control ion implantation in devices such as PLAD. Cross section set for electrons of Biaggi [1] was extended to allow production of radicals by electron impact dissociative ionization of BF3 molecule and used to obtain rate coefficients. Cross section sets for radical ions in BF3 were used to calculate rate coefficients for radicals production. Calculations were performed by using null collision Monte Carlo technique for electron and ion transport that has been verified again basic swarm benchmarks. \\[4pt] [1] S. Biagi, 2005 unpublished.

–

Authors

  • Vladimir Stojanovi\'c

    • Institute of physics, University of Belgrade, P.O.B. 68, 11000 Belgrade, Serbia
    • Institute of Physics, University of Belgrade, P.O.B. 68, 11000 Belgrade
    • Institute of Physics University of Belgrade, P.O.B. 68, 11080, Belgrade, Serbia

  • \v{Z}eljka Nikitovi\'c

    • Institute of physics, University of Belgrade, P.O.B. 68, 11000 Belgrade, Serbia
    • Institute of Physics, University of Belgrade, P.O.B. 68, 11000 Belgrade
    • Institute of Physics University of Belgrade, P.O.B. 68, 11080, Belgrade, Serbia

  • Zoran Raspopovic

    • Institute of Physics, University of Belgrade, P.O.B. 68, 11000 Belgrade

  • Jasmina Jovanovic

    • Faculty of Mechanical Engineering, University of Belgrade, 11000 Belgrade, Serbia

  • Svetlana Radovanov

    • Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930

  • Zoran Petrovic

    • Institute of physics, University of Belgrade, P.O.B. 68, 11000 Belgrade, Serbia
    • Institute of Physics, University of Belgrade, P.O.B. 68, 11000 Belgrade
    • Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Zemun, Belgrade, Serbia
    • Institute of Physics, University of Belgrade, Pregrevica 118, POB 68, 11000 Belgrade
    • Institute of Physics University of Belgrade, P.O.B. 68, 11080, Belgrade, Serbia
    • Institute of Physics, University of Belgrade, PO Box 68, 11080 Belgrade