RF and Microwave-Driven Plasmas

Presentations

• Simulation study of collisionless heating in single-frequency capacitively coupled discharges

  ORAL

  Nov. 16, 2011, 9:30 AM – Nov. 16, 2011, 9:45 AM

  Authors

  • Sarveshwar Sharma

    • NCPST, Dublin City University, Ireland

  • M.M. Turner

    • Dublin City University, Ireland
    • NCPST, Dublin City University, Ireland

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• Fluid simulation of the phase-shift effect in hydrogen capacitively coupled plasmas

  ORAL

  Nov. 16, 2011, 9:45 AM – Nov. 16, 2011, 10:00 AM

  Authors

  • Yu-Ru Zhang

    • School of Physics and Optoelectronic Technology, Dalian University of Technology

  • Xiang Xu

    • School of Physics and Optoelectronic Technology, Dalian University of Technology

  • Annemie Bogaerts

    • Department of Chemistry, University of Antwerp

  • You-Nian Wang

    • School of Physics and Optoelectronic Technology, Dalian University of Technology

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• Electron Heating and Plasma Generation at Electrode Edge - Fluid and Kinetic Modeling

  ORAL

  Nov. 16, 2011, 10:00 AM – Nov. 16, 2011, 10:15 AM

  Authors

  • Shahid Rauf

    • Applied Materials, Inc.

  • Ankur Agarwal

    • Applied Materials, Inc.

  • Kenneth Collins

    • Applied Materials, Inc.

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• Experimental characterization of dual-frequency capacitively coupled plasmas

  ORAL

  Nov. 16, 2011, 10:15 AM – Nov. 16, 2011, 10:30 AM

  Authors

  • Yong-Xin Liu

    • Dalian University of Technology

  • Xiao-song Li

  • Wen-Qi Lu

  • Yong-Nian Wang

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• STUDENT AWARD FINALIST: Role of additional inductive power on the electron energy distribution in Ar/O2 capacitively coupled plasma

  ORAL

  Nov. 16, 2011, 10:30 AM – Nov. 16, 2011, 10:45 AM

  Authors

  • Hyo-Chang Lee

    • Hanyang University
    • Department of Electrical Engineering, Hanyang University, Republic of Korea
    • Electrical Engineering, Hanyang University, Korea

  • Min-Hyong Lee

    • Electrical Engineering, Hanyang University, Korea

  • ChinWook Chung

    • Hanyang University
    • Department of Electrical Engineering, Hanyang University
    • Hanyang University, Korea
    • Department of Electrical Engineering, Hanyang University, Republic of Korea
    • Electrical Engineering, Hanyang University, Korea

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• RF capacitively coupled plasma with multi-hole multi electrode

  ORAL

  Nov. 16, 2011, 10:45 AM – Nov. 16, 2011, 11:00 AM

  Authors

  • Hun Su Lee

    • Korea Institute of Science and Technology

  • Yun Seong Lee

    • Korea Advanced Institute of Science and Technology

  • Sang Hun Seo

    • Korea Advanced Institute of Science and Technology

  • Hong Young Chang

    • Korea Advanced Institute of Science and Technology

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• The Interaction of the Capacitive and Inductive Coupling Mechanisms with RF Substrate Bias

  ORAL

  Nov. 16, 2011, 11:00 AM – Nov. 16, 2011, 11:15 AM

  Authors

  • Shuxia Zhao

  • Fei Gao

  • Ming Mao

  • Younian Wang

  • Annemie Bogaerts

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• Atomic chlorine and electron densities in inductively-coupled plasmas in pure Cl2 : Comparison of numerical simulations with experiments

  ORAL

  Nov. 16, 2011, 11:15 AM – Nov. 16, 2011, 11:30 AM

  Authors

  • Pascal Chabert

    • LPP Ecole Polytechnique - CNRS
    • LPP, CNRS-Ecole Polytechnique

  • Nishant Sirse

    • LPP, CNRS-Ecole Polytechnique

  • Yasmina Azamoum

    • LPP, CNRS-Ecole Polytechnique

  • Jean-Paul Booth

    • LPP, CNRS-Ecole Polytechnique

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• Influence of capacitive bias on electron dynamics in an inductively coupled plasma

  ORAL

  Nov. 16, 2011, 11:30 AM – Nov. 16, 2011, 11:45 AM

  Authors

  • Mujahid Zaka-ul-Islam

    • Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

  • Timo Gans

    • York Plasma Institute, Department of Physics, University of York, Heslington, York, YO10 5DQ, UK
    • York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK
    • University of York
    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

  • William Graham

    • Queens University of Belfast
    • Queens University Belfast
    • Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

  • Kari niemi

    • Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK
    • Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Belfast BT7 1NN, Northern Ireland, UK
    • Queens University Belfast
    • Centre for Plasma Physics, Queen's University Belfast, Belfast BT7 1NN, UK

  • Deborah O'Connell

    • York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK
    • University of York
    • York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, UK

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• UV Radiation from Hydrogen Containing Microwave Plasmas

  ORAL

  Nov. 16, 2011, 11:45 AM – Nov. 16, 2011, 12:00 PM

  Authors

  • E. Felizardo

    • IPFN-IST

  • E. Tatarova

    • IPFN-IST

  • J. Henriques

    • IPFN-IST

  • F.M. Dias

    • IPFN-IST

  • C.M. Ferreira

    • IPFN-IST

  • B. Gordiets

    • Lebedev Phys. Inst.

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