GEC Foundation Talk: Plasma Etching - The Challenges Ahead in Enabling Nanoelectronics

Presentations

• Plasma Etching - The Challenges Ahead in Enabling Nanoelectronics

  COFFEE_KLATCH · Invited

  Nov. 16, 2011, 8:00 AM – Nov. 16, 2011, 9:00 AM

  Authors

  • Richard Gottscho

    • Lam Research

  View abstract →