Electron Transport in Ar/H2 Mixtures

POSTER

Abstract

In this work we present transport coefficients for electrons in Ar/H2 mixtures for the conditions used in plasma assisted technologies for semiconductor production. We used numerical solution of Boltzman equation analysis obtained by program ELENDIF and Monte Carlo technique. For the conditions of very high electric fields is shown contribution of backscattered electrons of Ha emission for stainless steel and graphite anode surface.

Authors

  • Vladimir Stojanovi\'c

    • Institute of physics, University of Belgrade, P.O.B. 68, 11000 Belgrade, Serbia
    • Institute of Physics, University of Belgrade, P.O.B. 68, 11000 Belgrade
    • Institute of Physics University of Belgrade, P.O.B. 68, 11080, Belgrade, Serbia

  • \v{Z}eljka Nikitovi\'c

    • Institute of physics, University of Belgrade, P.O.B. 68, 11000 Belgrade, Serbia
    • Institute of Physics, University of Belgrade, P.O.B. 68, 11000 Belgrade
    • Institute of Physics University of Belgrade, P.O.B. 68, 11080, Belgrade, Serbia

  • Zoran Petrovic

    • Institute of physics, University of Belgrade, P.O.B. 68, 11000 Belgrade, Serbia
    • Institute of Physics, University of Belgrade, P.O.B. 68, 11000 Belgrade
    • Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Zemun, Belgrade, Serbia
    • Institute of Physics, University of Belgrade, Pregrevica 118, POB 68, 11000 Belgrade
    • Institute of Physics University of Belgrade, P.O.B. 68, 11080, Belgrade, Serbia
    • Institute of Physics, University of Belgrade, PO Box 68, 11080 Belgrade