Sheaths and Plasma Boundaries
INVITED · CT2 ·
Presentations
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LIF measurements of the ion distribution function in the sheath and pre-sheath of a biased capacitively coupled plasma reactor
COFFEE_KLATCH · Invited
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Authors
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Walter Gekelman
- Dept. of Physics and Astronomy, UCLA
- UCLA
- Dept. of Physics, University of California
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Control of the Ion Energy Distribution on Plasma Electrodes
COFFEE_KLATCH · Invited
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Authors
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Demetre Economou
- University of Houston
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