Workshop: Control of Distribution Functions in Low Temperature Plasmas
ORAL · AM1 ·
Presentations
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INTRODUCTION
ORAL
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Authors
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Igor Kaganovich
- Princeton Plasma Physics Laboratory
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Electron Temperature Modification in Gas Discharge Plasmas
ORAL
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Authors
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Valery Godyak
- PlasmaSensors, Brookline, MA
- RF Plasma Consulting
- University of Michigan and RF Plasma Consulting
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Plasma-surface interactions in the control of plasma distribution functions: $\alpha $-C:H surfaces impacted by Ar/H2 plasmas
ORAL
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Authors
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David Graves
- University of California, Berkeley
- University of California at Berkeley
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Ning Ning
- University of California, Berkeley
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Nick Fox-Lyon
- University of Maryland, College Park
- University of Maryland
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Gottlieb Oehrlein
- University of Maryland, College Park
- University of California, Berkeley
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BREAK
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Ion energy distribution functions of ions hitting nanoparticles in plasmas
ORAL
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Authors
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Uwe Kortshagen
- University of Minnesota
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Federico Galli
- University of Minnesota
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Meenakshi Mamunuru
- University of Minnesota
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Electron energy distribution functions modified by MacKenzie Maxwell Demons
ORAL
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Authors
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Noah Hershkowitz
- University of Wisconsin - Madison
- Nuclear Eng. and Eng. Physics, University of Wisconsin, Madison/WI, United States
- University of Wisconsin-Madison
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Chi-Shung Yip
- University of Wisconsin - Madison
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Multiple electron distributions in multidipolar plasma devices
ORAL
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Authors
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Scott Robertson
- University of Colorado
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Scott Knappmiller
- University of Colorado
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Volumetric Control of Anisotropic Electron Distribution Functions in Plasmas with Langmuir Oscillations
ORAL
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Authors
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A.S. Mustafaev
- St. Petersburg State Mining University
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I.D. Kaganovich
- PPPL
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V.I. Demidov
- WVU
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S.F. Adams
- AFRL
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The Langmuir Paradox: can the ion acoustic instability at the sheath edge thermalize the ions too?
ORAL
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Authors
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Chi-Shung Yip
- University of Wisconsin - Madison
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Noah Hershkowitz
- University of Wisconsin - Madison
- Nuclear Eng. and Eng. Physics, University of Wisconsin, Madison/WI, United States
- University of Wisconsin-Madison
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Greg Severn
- University of San Diego
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DISCUSSION: Diagnostics Methods for Measurements of Plasma Distribution Functions
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Physical Mechanisms of the Electron Energy Distribution Function Control in Inhomogeneous Non-stationary Plasma
ORAL
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Authors
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Anatoly Kudryavtsev
- SPbSU
- St.Petersburg State University
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Lev Tsendin
- SPbSPU
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Lunch Break and Industry Speakers
ORAL
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Authors
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Peter Ventzek
- Tokyo Electron America
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Robert J. Baker
- AFOSR, retired
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Experiments, simulations and modelling of the electron energy distribution functions in low pressure rf excited non-local plasmas
ORAL
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Authors
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Rod Boswell
- Research School of Physics and Engineering, The Australian National University, Canberra, Australia
- Australian National University
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Christine Charles
- Australian National University
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Kazunori Takahashi
- Australian National University
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Control of electron energy distribution function by high frequency fields and by the effect of crossed magnetic field
ORAL
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Authors
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Zoran Petrovic
- Institute of physics, University of Belgrade, P.O.B. 68, 11000 Belgrade, Serbia
- Institute of Physics, University of Belgrade, P.O.B. 68, 11000 Belgrade
- Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Zemun, Belgrade, Serbia
- Institute of Physics, University of Belgrade, Pregrevica 118, POB 68, 11000 Belgrade
- Institute of Physics University of Belgrade, P.O.B. 68, 11080, Belgrade, Serbia
- Institute of Physics, University of Belgrade, PO Box 68, 11080 Belgrade
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Sasa Dujko
- Centrum Wiskunde and Informatica, PO Box 94097, 1090 GB Amsterdam, The Netherlands
- Centrum Wiskunde and Informatica (CWI), PO Box 94097, 1090 GB Amsterdam, The Netherlands
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Ronald White
- ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia
- ARC Centre for Antimatter-Matter Studies, School of Electrical Engineering and Physical Sciences, James Cook University, 4810 Townsville, Australia
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Nonlocal Control of Electron Energy Distribution Functions in Plasmas with Active Boundaries
ORAL
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Authors
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V.I. Demidov
- WVU
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I.D. Kaganovich
- PPPL
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A.S. Mustafaev
- SPbMTU
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M.E. Koepke
- WVU
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Y. Raitses
- PPPL
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S.F. Adams
- AFRL
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I. Schweigert
- ITAM SB RAS
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Control of Ion and Electron Distribution Functions by the Electrical Asymmetry Effect
ORAL
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Authors
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Uwe Czarnetzki
- Ruhr-University Bochum, Faculty for Physics and Astronomy
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DISCUSSION: Numerical Methods for Measurements of Plasma Distribution Functions
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Plasma-Surface Interactions and Impact on Electron Energy Distribution Function
ORAL
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Authors
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Nick Fox-Lyon
- University of Maryland, College Park
- University of Maryland
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Gottlieb Oehrlein
- University of Maryland, College Park
- University of California, Berkeley
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N. Ning
- University of California, Berkeley
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D.B. Graves
- University of California, Berkeley
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Valery Godyak
- PlasmaSensors, Brookline, MA
- RF Plasma Consulting
- University of Michigan and RF Plasma Consulting
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Is particle distribution control necessary in plasma etching processes?
ORAL
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Authors
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M.M. Turner
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B.J. Keville
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S. Daniels
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Y. Zhang
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A.M. Holohan
- Dublin City University, Ireland
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Fast Analytical-Numerical Model of Atmospheric Pressure Radio-Frequency Capacitive Discharges
ORAL
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Authors
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M.A. Lieberman
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A.J. Lichtenberg
- Dept EECS-1770, Univ Calif, Berkeley CA 94720
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C. Lazzaroni
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P. Chabert
- LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France
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A. Leblanc
- ENS, Cachan, UPMC, France
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Jing Zhang
- Dept Appl Phys, Donghua U, Shanghai 201620, China
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Kr ion Laser-Induced Fluorescence using a tunable diode laser near 729nm
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Authors
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Greg Severn
- University of San Diego
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Simulating Electron Scattering in Cold-Cathode Discharges
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Authors
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Alexander V. Khrabrov
- Princeton Plasma Physics Laboratory
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Measurement of the perturbed distributions of electrons and ions
ORAL
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Authors
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Fred Skiff
- University of Iowa
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