Plasma Deposition III

Presentations

• Purified Si Film Formation from Metallurgical-Grade Si by Hydrogen Plasma Induced Chemical Transport

  COFFEE_KLATCH · Invited

  Oct. 8, 2010, 4:00 PM – Oct. 8, 2010, 4:30 PM

  Authors

  • Kiyoshi Yasutake

    • Osaka University
    • Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan

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• Surface chemistry of the preferred (111) and (220) crystal oriented microcrystalline Si films by radio-frequency plasma-enhanced chemical vapor deposition

  ORAL

  Oct. 8, 2010, 4:30 PM – Oct. 8, 2010, 4:45 PM

  Authors

  • Hajime Shirai

    • Saitama University
    • Saitama University, Japan

  • Hajime Shirai

    • Saitama University
    • Saitama University, Japan

  • Hajime Shirai

    • Saitama University
    • Saitama University, Japan

  • Hajime Shirai

    • Saitama University
    • Saitama University, Japan

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• How much water we have in silane-oxygen plasma during SiO2 deposition in HDP-PECVD reactor

  ORAL

  Oct. 8, 2010, 4:45 PM – Oct. 8, 2010, 5:00 PM

  Authors

  • Pavel Bulkin

    • LPICM, Ecole polytechnique, Palaiseau 91128 France
    • LPICM, Ecole Polytechnique, 91128 Palaiseau Cedex, France

  • Tatiana Novikova

    • LPICM, Ecole polytechnique, Palaiseau 91128 France

  • Dmitri Daineka

    • LPICM, Ecole polytechnique, Palaiseau 91128 France

  • Roelene Botha

    • LPICM, Ecole polytechnique, Palaiseau 91128 France

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• Plasma induced chemistry of self-assembled nanoparticles and underlying surface for High-k film growth

  ORAL

  Oct. 8, 2010, 5:00 PM – Oct. 8, 2010, 5:15 PM

  Authors

  • Takeshi Kitajima

    • National Defense Academy

  • Toshiki Nakano

    • National Defense Academy

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• Plasma synthesis of silicon nanocrystals as a new route for large area electronic applications

  ORAL

  Oct. 8, 2010, 5:15 PM – Oct. 8, 2010, 5:30 PM

  Authors

  • Pere Roca i Cabarrocas

    • CNRS/Ecole Polytechnique
    • LPICM, Ecole Polytechnique, 91128 Palaiseau Cedex, France
    • LPICM, Ecole Polytechnique

  • Alexey Abramov

  • Ka-Hyun Kim

  • Erik V. Johnson

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• Cold atmospheric pressure plasma polymerization of hexamethyldisiloxane for improved wood plastics composites

  ORAL

  Oct. 8, 2010, 5:30 PM – Oct. 8, 2010, 5:45 PM

  Authors

  • Patrick Pedrow

    • Washington State University

  • William Lekobou

    • Washington State University

  • Erik Wemlinger

    • Washington State University

  • Karl Englund

    • Washington State University

  • Marie-Pierre Laborie

    • University of Freiburg

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• HMDSO / O$_{2}$ atmospheric pressure plasma chemistry leading to SiO$_{2}$ film synthesis

  ORAL

  Oct. 8, 2010, 5:45 PM – Oct. 8, 2010, 6:00 PM

  Authors

  • Ruediger Reuter

    • Ruhr-Universit\"at Bochum

  • Dirk Ellerweg

    • Ruhr-Universit\"at Bochum

  • Jan Benedikt

    • Ruhr-Universit\"at Bochum
    • Ruhr-University Bochum

  • Achim von Keudell

    • Ruhr-Universit\"at Bochum

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