Capacitively-Coupled Plasmas

Presentations

• Progress on simulations of multiple-frequency capacitively coupled discharges

  COFFEE_KLATCH · Invited

  Oct. 8, 2010, 4:00 PM – Oct. 8, 2010, 4:30 PM

  Authors

  • Zoltan Donko

    • Research Institute for Solid State Physics and Optics, Hungarian Academy of Sciences, Budapest, Hungary
    • Research Institute for Solid State Physics and Optics

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• Two-dimensional hybrid simulation of capacitively coupled plasmas with two rf sources

  ORAL

  Oct. 8, 2010, 4:30 PM – Oct. 8, 2010, 4:45 PM

  Authors

  • Yuan-Hong Song

    • Dalian University of Technology

  • Xiang Xu

  • Zhen-Hua Bi

  • Yu-Ru Zhang

  • You-Nian Wang

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• The Electrical Asymmetry Effect in multi-frequency capacitively coupled radio frequency discharges

  ORAL

  Oct. 8, 2010, 4:45 PM – Oct. 8, 2010, 5:00 PM

  Authors

  • Julian Schulze

  • Zoltan Donko

    • Hungarian Academy of Science

  • Edmund Schuengel

  • Uwe Czarnetzki

    • Ruhr-University Bochum

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• Electrode Impedance Effect in a CCP reactor

  COFFEE_KLATCH · Invited

  Oct. 8, 2010, 5:00 PM – Oct. 8, 2010, 5:30 PM

  Authors

  • Yohei Yamazawa

    • Tokyo Electron AT LTD.

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• Effects of rf phase control in VHF-CCP system

  ORAL

  Oct. 8, 2010, 5:30 PM – Oct. 8, 2010, 5:45 PM

  Authors

  • Chulho Shin

    • Samsung Electronics Co.
    • Samsung Electronics

  • Yeonghun Han

    • Samsung Electronics Co.

  • Sang-min Jeong

    • Samsung Electronics Co.

  • Doungyong Sung

    • Samsung Electronics Co.
    • Samsung Electronics

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• Confinement effect due to standing wave in VHF driven CCP

  ORAL

  Oct. 8, 2010, 5:45 PM – Oct. 8, 2010, 6:00 PM

  Authors

  • Seok-Hwan Lee

    • Seoul National University

  • Myung-Sun Choi

    • Seoul National University

  • Gon-Ho Kim

    • Seoul National University

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