Inductively-Coupled Plasmas
FOCUS · PR1 ·
Presentations
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2D Hybrid Fluid-Analytical Model of Inductive/Capacitive Plasma Discharges
COFFEE_KLATCH · Invited
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Authors
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Emi Kawamura
- University of California, Berkeley
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Electrical and Plasma Parameters of ICP with High Coupling Efficiency
ORAL
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Authors
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Valery Godyak
- RF Plasma Consulting, Brookline USA
- RF Plasma Consulting
- Brookline, RF Plasma Consulting, Massachussetts, USA
- RF PLasma Consulting
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Measurement of space and time resolved E-H and H-E transition in inductively coupled plasma in O$_{2}$/Ar
ORAL
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Authors
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Yuichiro Hayashi
- Keio University
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Yo Mitsui
- Keio University
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Tetsuya Tatsumi
- Sony corp.
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Toshiaki Makabe
- Keio University
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The dynamics of charged particles close to the E-H mode transition in argon and oxygen inductively coupled radio-frequency plasmas
ORAL
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Authors
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Mujahid Zaka ul Islam
- Queen's University Belfast
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Timo Gans
- Queen's University Belfast, UK
- Queen's University Belfast
- Centre for Plasma Physics, Queens University Belfast, Belfast, BT7 1NN, Northern Ireland, UK
- Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK
- CPP, Queens University, Belfast, United Kingdom
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Deborah O'Connell
- Queen's University Belfast
- CPP, Queens University, Belfast, United Kingdom
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W.G. Graham
- Queen's University Belfast
- Queen's University of Belfast
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Electrical Modeling of the Inductively Coupled Plasma Discharges
ORAL
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Authors
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William Graham
- Queen's University of Belfast
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Robson Vieira
- State University of Campinas
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Stanislav Moshkalev
- State University of Campinas
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Sergey Balashov
- Center of Technology for Information Renato Archer
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