Elastic Differential Cross Sections for C$_{4}$F$_{6}$ by Low Energy Electron Impact

We report on the first measurements of elastic differential cross sections (DCSs) in C$_{4}$F$_{6}$ molecules by low energy electron impact. C$_{4}$F$_{6}$ has three isomers, hexafluoro-1,3-butadiene (1,3-C$_{4}$F$_{6})$, hexafluoro-2-butyne (2-C$_{4}$F$_{6})$ and hexafluorocyclobutene (c-C$_{4}$F$_{6})$. 1,3-C$_{4}$F$_{6}$ has been suggested as a potential plasma processing molecule to be used as a replacement to the traditional reactive etching gases , having a negligible global warming potential. The experimental set-up for DCSs consists of a crossed-beam method in conjunction with the relative flow technique . These measurements were performed at incident electron energies from 3--100 eV and scattering angles of 20--130 degrees, with an energy resolution of $\sim $50 meV at FWHM. The elastic DCSs for two isomers 1,3-C$_{4}$F$_{6}$ and 2-C$_{4}$F$_{6}$ at low incident electron energy, shows some considerable differences. These will be presented in more detail at the conference.