Simulation of a inductively coupled hydrogen plasma for sterilization processes

Usability of plasmas for sterilization of medical devices is numerously investigated [1]. On short timescales, the main sterilization agent in a gas discharge is the VUV/UV radiation [2]. In order to generate a broad VUV spectrum, a hydrogen discharge can be used. Aim of this work is to simulate a hydrogen discharge in a double inductively coupled plasma (DICP) reactor. The simulation is done with the Hybrid Plasma Equipment Model (HPEM) [3]. The results of the simulation are verified with experimental data of optical emission spectroscopy and mass spectroscopy. Additionally, a Langmuir probe is used to verify the spatially resolved electron density in the discharge. \\[4pt] [1] H Halfmann et al., J. Phys. D: Appl. Phys. 40 (2007) 4145-4154 \newline [2] H Halfmann et al., J. Phys. D: Appl. Phys. 40 (2007) 5907-5911 \newline [3] M Kushner, J. Phys. D: Appl. Phys. 42 (2009) 194013