Special Evening Session

Presentations

• Plasma Processing for Nanoelectronics --- History and Prospects

  COFFEE_KLATCH · Invited

  Oct. 5, 2010, 8:00 PM – Oct. 5, 2010, 8:35 PM

  Authors

  • Michael Lieberman

    • UC Berkeley

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• Ion Molecule Collision Processes in Gaseous Electronics

  COFFEE_KLATCH · Invited

  Oct. 5, 2010, 8:35 PM – Oct. 5, 2010, 9:00 PM

  Authors

  • Eldon Ferguson

    • University of Colorado, Boulder

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• Current Issues for next generation large area and high rate plasma process for thin film deposition

  COFFEE_KLATCH · Invited

  Oct. 5, 2010, 9:00 PM – Oct. 5, 2010, 9:20 PM

  Authors

  • Jeon G. Han

    • Center for Advanced Plasma Surface Technology, Sungkyunkwan University
    • Sungkyunkwan University
    • Center for Advanced Plasma Surface Technology, Sungkyunkwan University, 300 Chunchun-dong, Jangan-gu, Suwon, 440-746, Republic of Korea

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• Academic Roadmap of Plasma Process Technologies

  COFFEE_KLATCH · Invited

  Oct. 5, 2010, 9:20 PM – Oct. 5, 2010, 9:30 PM

  Authors

  • Masaharu Shiratani

    • Kyushu University

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• Discussion

  Oct. 5, 2010, 9:30 PM – Oct. 5, 2010, 10:00 PM

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