Atmospheric Pressure Micro Inductively Coupled Plasma Source with Floating Electrode

ORAL

Abstract

Atmospheric pressure micro-ICP source is realized. Cu coil electrode and trench are prepared by milling glass epoxy substrate. U-shaped coil electrode is 9mm wide and 50mm long. Plasma ignition is promoted with the floating electrode placed inside the channel for the gas flow. Micro-ICP is generated at $\sim $35W of 100 MHz with He gas flow. In the spectra, O and OH peaks are observed in addition to He or Ar peaks, but metal (W) or C peaks are not observed. The device shows durability against $>$5h operation.

Authors

  • Minoru Sasaki

    • Toyota Technological Institute

  • Hiroki Matsuyama

    • Toyota Technological Institute

  • Shinya Kumagai

    • Toyota Technological Institute

  • Masaru Hori

    • Nagoya University
    • Department of Electrical Engineering and Computer Science, Nagoya University
    • Nagoya Univ.
    • Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603