Plasma Surface Interactions I

Presentations

• Nanotextured polymers by plasma etching: defining chemistry and topography for superior wetting and optics

  COFFEE_KLATCH · Invited

  Oct. 5, 2010, 8:30 AM – Oct. 5, 2010, 9:00 AM

  Authors

  • Rosa Di Mundo

    • University of Bari

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• Study of the modifications induced by plasma VUV light on photoresist polymers for the development of plasma cure treatments

  ORAL

  Oct. 5, 2010, 9:00 AM – Oct. 5, 2010, 9:15 AM

  Authors

  • Marc Fouchier

    • CNRS/LTM

  • Erwine Pargon

    • CNRS/LTM

  • Laurent Azarnouche

    • CNRS/LTM

  • Olivier Luere

    • CNRS/LTM

  • Kevin Menguelti

    • CNRS/LTM

  • Gilles Cunge

    • Laboratoire des Technologies de la Micro\'electronique, CNRS
    • LTM-CNRS, Grenoble, France
    • LTM-CNRS
    • CNRS/LTM

  • Nader Sadeghi

    • LSP, Universit\'e Joseph Fourier and CNRS
    • LTM-CNRS
    • Univ. Grenoble \& CNRS, France
    • LSP, Univ. \& CNRS Grenoble, France
    • CNRS/LSP

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• In-line plasma cleaning of EUV multilayer mirrors

  ORAL

  Oct. 5, 2010, 9:15 AM – Oct. 5, 2010, 9:30 AM

  Authors

  • Evdokim Malykhin

    • Nuclear Physics Institute, Moscow State University

  • Oleg Braginsky

    • Nuclear Physics Institute, Moscow State University

  • Alexander Kovalev

    • Nuclear Physics Institute, Moscow State University

  • Dmitry Lopaev

    • Nuclear Physics Institute, Moscow State University

  • Alexander Rakhimov

    • Nuclear Physics Institute, Moscow State University

  • Tatyana Rakhimova

    • Nuclear Physics Institute, Moscow State University

  • Anna Vasilieva

    • Nuclear Physics Institute, Moscow State University

  • Sergey Zyryanov

    • Nuclear Physics Institute, Moscow State University

  • Konstantin Koshelev

    • Institute for Spectroscopy RAS, Troitsk

  • Vladimir Krivtsun

    • Institute for Spectroscopy RAS, Troitsk

  • Oleg Yakushev

    • Institute for Spectroscopy RAS, Troitsk

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• Infrared spectroscopic study on oxidation of carbon for environmental solution

  ORAL

  Oct. 5, 2010, 9:30 AM – Oct. 5, 2010, 9:45 AM

  Authors

  • Taka-aki Kawakami

    • Graduate School of Sci. and Technol., Nagasaki Univ.

  • Masanori Shinohara

    • Graduate School of Sci. and Technol., Nagasaki Univ.

  • Kojiro Hara

    • Graduate School of Sci. and Technol., Nagasaki Univ.

  • Yoshinobu Matsuda

    • Dep. od EEE, Nagasaki Univ.

  • Hiroshi Fujiyama

    • Graduate School of Sci. and Technol., Nagasaki Univ.

  • Yuki Nitta

    • TOYO a-tec

  • Tatsuyuki Nakatani

    • TOYO a-tec

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• Hydrogen/Argon Plasma-Amorphous Carbon Near-Surface Interactions

  ORAL

  Oct. 5, 2010, 9:45 AM – Oct. 5, 2010, 10:00 AM

  Authors

  • N. Ning

    • Dept of Chemical Engineering, University of California, Berkeley

  • D.B. Graves

    • University of California, Berkeley
    • Dept of Chemical Engineering, University of California, Berkeley

  • N. Fox-Lyon

    • Dept of Materials Science \& Engineering and Inst. for Research in Electronics and Applied Physics, University of Maryland

  • G.S. Oehrlein

    • Dept of Materials Science \& Engineering and Inst. for Research in Electronics and Applied Physics, University of Maryland

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• Studies of Asperity-Scale Plasma Discharge Phenomena

  ORAL

  Oct. 5, 2010, 10:00 AM – Oct. 5, 2010, 10:15 AM

  Authors

  • Javan Albright

    • University of Texas

  • Laxminarayan Raja

  • Matthew Manley

  • K. Ravi-Chandar

  • Sikhanda Satapathy

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• Plasma VUV intensity as a function of its electron energy distribution

  ORAL

  Oct. 5, 2010, 10:15 AM – Oct. 5, 2010, 10:30 AM

  Authors

  • Lee Chen

    • Tokyo Electron America
    • Tokyo Electron America, Inc

  • Jianping Zhao

    • Tokyo Electron America, Inc

  • Ron Bravenec

    • Fourth State Research and Tokyo Electron America
    • Tokyo Electron America, Inc

  • Merritt Funk

    • Tokyo Electron America
    • Tokyo Electron America, Inc

  • Radha Sundararajan

    • Tokyo Electron America, Inc

  • Koji Koyama

    • Tokyo Electron Technology Development Institute, Inc

  • Toshihisa Nozawa

    • Tokyo Electron Technology Development Institute, Inc

  • Seji Samukawa

    • Tohoku University

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