Capacitively-Coupled Plasmas II

Presentations

• High Frequency Capacitively Coupled Plasmas: Implicit Electron Momentum Transport with a Full-wave Maxwell Solver

  ORAL

  Oct. 23, 2009, 10:00 AM – Oct. 23, 2009, 10:15 AM

  Authors

  • Yang Yang

    • Iowa State University

  • Mark Kushner

    • University of Michigan

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• Space- and Time-dependent electron velocity distribution in VHF-CCP in CF$_{4}$/Ar

  ORAL

  Oct. 23, 2009, 10:15 AM – Oct. 23, 2009, 10:30 AM

  Authors

  • Takashi Yagisawa

    • Keio University

  • Toshiaki Makabe

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• A scalable, VHF/UHF, capacitively coupled plasma source for large-area applications at high frequencies

  ORAL

  Oct. 23, 2009, 10:30 AM – Oct. 23, 2009, 10:45 AM

  Authors

  • Bert Ellingboe

    • Dublin City Univeristy
    • NCPST-School of Physics, DCU, Dublin, Ireland
    • Dublin City University / Phive Plasma Technologies

  • David O'Farrell

    • Dublin City University
    • Dublin City University / Phive Plasma Technologies

  • Cezar Gaman

    • Dublin City University

  • Fiachra Green

    • Phive Plasma Technologies

  • Neal O'Hara

    • Phive Plasma Technologies

  • Tomasz Michna

    • Phive Plasma Technologies

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• Selective Influence of Magnetic Field Direction on Plasma Uniformity

  ORAL

  Oct. 23, 2009, 10:45 AM – Oct. 23, 2009, 11:00 AM

  Authors

  • Wenli Collison

    • Intevac

  • Vladimir Kudriavtsev

    • Intevac

  • Michael Barnes

    • Intevac
    • Intevac Corporation

  • Mark Kushner

    • University of Michigan

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• Experimental and theoretical studies of the electrode impedance effect in capacitive discharges

  ORAL

  Oct. 23, 2009, 11:00 AM – Oct. 23, 2009, 11:15 AM

  Authors

  • Dennis Ziegler

    • Ruhr University Bochum

  • Thomas Mussenbrock

    • Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Ruhr University Bochum

  • Yohei Yamazawa

    • Tokyo Electron AT LTD

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• Influence of collisions on spatial damping of electrostatic electron waves in a low-pressure plasma

  ORAL

  Oct. 23, 2009, 11:15 AM – Oct. 23, 2009, 11:30 AM

  Authors

  • Jens Oberrath

    • Theoretical Electrical Engineering, Ruhr-Universit\"at Bochum

  • Ralf Peter Brinkmann

    • Theoretical Electrical Engineering, Ruhr-Universit\"at Bochum

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• Intermediate frequency breakdown

  ORAL

  Oct. 23, 2009, 11:30 AM – Oct. 23, 2009, 11:45 AM

  Authors

  • Derek Monahan

    • Dublin City University

  • Miles Turner

    • Dublin City University
    • NCPST, DCU
    • NCPST, Dublin City University

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• Atmospheric Pressure RF Plasma Electrical and Optical Characteristics

  ORAL

  Oct. 23, 2009, 11:45 AM – Oct. 23, 2009, 12:00 PM

  Authors

  • Ali Gulec

    • Suleyman Demirel University Turkey

  • Lutfi Oksuz

    • University of Wisconsin Madison
    • Suleyman Demirel University

  • Noah Hershkowitz

    • University of Wisconsin Madison
    • University of Wisconsin - Madison
    • University of Wisconsin-Madison

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