Plasma-Surface Interactions

Presentations

• Plasma surface interactions in fluorocarbon systems

  COFFEE_KLATCH · Invited

  Oct. 22, 2009, 10:00 AM – Oct. 22, 2009, 10:30 AM

  Authors

  • Matthew Goeckner

    • The University of Texas at Dallas
    • University of Texas at Dallas

  View abstract →

• Temperature Impact on Plasma-Surface Interactions in an FC Plasma Environment

  ORAL

  Oct. 22, 2009, 10:30 AM – Oct. 22, 2009, 10:45 AM

  Authors

  • Caleb Nelson

    • University of Texas at Dallas

  • Iqbal Saraf

    • University of Texas at Dallas

  • Lawrence Overzet

    • The University of Texas at Dallas
    • University of Texas at Dallas

  • Matthew Goeckner

    • The University of Texas at Dallas
    • University of Texas at Dallas

  View abstract →

• SiO$_{2}$ Film Etching Process Using Environment-Friendly New Gas C$_{5}$F$_{7}$H

  ORAL

  Oct. 22, 2009, 10:45 AM – Oct. 22, 2009, 11:00 AM

  Authors

  • Yudai Miyawaki

    • Nagoya University

  • Keigo Takeda

    • Nagoya University

  • Azumi Ito

    • Zeon Corporation

  • Masahiro Nakamura

    • Zeon Corporation

  • Makoto Sekine

    • Nagoya University

  • Masaru Hori

    • Nagoya University

  View abstract →

• Plasma-surface interactions during Si etching in Cl- and Br-based plasmas: An empirical and atomistic study

  ORAL

  Oct. 22, 2009, 11:00 AM – Oct. 22, 2009, 11:15 AM

  Authors

  • Hirotaka Tsuda

  • Tatsuya Nagaoka

  • Hiroki Miyata

  • Yoshinori Takao

  • Koji Eriguchi

  • Kouichi Ono

    • Kyoto University

  View abstract →

• Analysis of the surface reactions of ArF photoresist during fluorocarbon plasma etching by XPS

  ORAL

  Oct. 22, 2009, 11:15 AM – Oct. 22, 2009, 11:30 AM

  Authors

  • Takuya Takeuchi

    • Nagoya University

  • Makoto Sekine

    • Nagoya University

  • Hirotaka Toyoda

    • Nagoya University

  • Keigo Takeda

    • Nagoya University

  • Masaru Hori

    • Nagoya University

  • Song-Yun Kang

    • Tokyo Electron Ltd.

  • Ikuo Sawada

    • Tokyo Electron Ltd.

  View abstract →

• Determination of gas phase and surface reactions in plasma polymerization

  ORAL

  Oct. 22, 2009, 11:30 AM – Oct. 22, 2009, 11:45 AM

  Authors

  • Dirk Hegemann

    • Empa, St.Gallen/Switzerland

  View abstract →

• Role of plasma activation in the kinetics of CNT growth in PECVD process

  ORAL

  Oct. 22, 2009, 11:45 AM – Oct. 22, 2009, 12:00 PM

  Authors

  • Irina Lebedeva

    • Kintech Lab Ltd

  • Alexey Gavrikov

  • Alexey Baranov

    • Kintech Lab Ltd

  • Maxim Belov

    • Kintech Lab Ltd

  • Andrey Knizhnik

    • Kintech Lab Ltd

  • Boris Potapkin

    • Kintech Lab, Moscow, Russia
    • Kintech Lab Ltd

  • Timothy Sommerer

    • GE Global Research Center

  View abstract →