Frequency Agile Tuning For Plasmas Excited Using RF

POSTER

Abstract

Frequency agile tuning, while commonly used at GHz range, presents a number of difficulties for realization at frequencies in the 10's of MHz. We describe methods to achieve frequency agile tuning to perform controllable impedance matching and discuss methods by which tuning ranges may be further broadened.

Authors

  • Scott Heres

    • Colorado State University

  • Michael Kabala

    • Colorado State University

  • Carl Almgren

    • Colorado State University

  • Cameron Moore

    • Colorado State University

  • George Collins

    • Colorado State University