Low-pressure plasma discharge of Ar/N$_{2}$/CO$_{2}$ ternary mixture

A low-pressure DC plasma discharge sustained in a 1.6{\%}Ar-2.7{\%}N$_{2}$-95.3{\%}CO$_{2}$ ternary mixture is studied. This plasma was generated in the total pressure range of 0.5 to 8.7 Torr, power of 6.3 W and with 12 l/min flow rate of gases. The diagnostic has been made by optical emission spectroscopy (OES) using a spectrometer and the determination of electron temperature was obtained by the measurements with a Langmuir double Probe. The species observed in the plasma mixture were CO$_{2}$, CO$_{2}^{+}$, CN, CO, CO$^{+}$, O$_{2}$, O$_{2}^{+}$, N$_{2}$, N$_{2}^{+}$, NO, C$^{+}$, Ar, and Ar$^{+}$. The electron temperature was found to be of 10.63 eV, and the ion density in the order of 10$^{10}$cm$^{-3}$.