Inductively Coupled Plasmas
FOCUS · HT1 ·
Presentations
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Electron heating in inductive discharges
COFFEE_KLATCH · Invited
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Authors
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Gerjan Hagelaar
- LAPLACE, Universit\'e de Toulouse
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Production and Control of Inductively-Coupled Plasmas with Multiple Low-Inductance Antenna Modules for Large-Area and Low-Damage Processes of Next-Generation Devices
COFFEE_KLATCH · Invited
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Authors
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Yuichi Setsuhara
- Osaka University, JST, CREST
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Global model of instabilities in low-pressure inductively coupled chlorine plasmas
ORAL
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Authors
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Emilie Despiau-Pujo
- LPP - Ecole Polytechnique
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Pascal Chabert
- LPP, Ecole Polytechnique
- CNRS-Ecole Polytechnique
- LPP-Ecole Polytechnique-CNRS
- Laboratoire de Physique des Plasmas, Ecole Polytechnique, France
- LPP - Ecole Polytechnique
- LPP
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A control-oriented self-consistent model of an inductively-coupled plasma
ORAL
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Authors
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Bernard Keville
- NCPST, Dublin City University
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Miles Turner
- Dublin City University
- NCPST, DCU
- NCPST, Dublin City University
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Effects of RF-bias power on plasma parameters in a low gas pressure inductively coupled plasma
ORAL
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Authors
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Hyo-Chang Lee
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Min-Hyong Lee
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Chin-Wook Chung
- Department of Electrical Engineering, Hanyang University
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Low-pressure inductive gas discharges in Ar, Kr, He and Ar+Hg mixture
POSTER
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Authors
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Natalia Denisova
- Institute of Theoretical \& Applied Mechanics
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Revalde Gita
- Institute of Atomic Physics and Spectroscopy, University of Latvia
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Skudra Atis
- Institute of Atomic Physics and Spectroscopy, University of Latvia
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