Low Pressure Plasma Diagnostics
FOCUS · GT3 ·
Presentations
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Plasma diagnostics using floating harmonics method and recent results in processing plasmas
COFFEE_KLATCH · Invited
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Authors
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ChinWook Chung
- Hanyang University
- HanYang University
- Hanyang university
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Evaluation of Advanced Algorithms to improve EEDF extraction from Langmuir Probe data Using Tikhonov Regularization Methods
ORAL
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Authors
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A. El Saghir
- NCSU
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C. Kennedy
- NCSU
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Steven Shannon
- NCSU
- North Carolina State University
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B. Pathak
- University of Kansas
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J. Alexander
- University of Kansas
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K. Nordheden
- University of Kansas
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Impedance Characteristics of the Plasma Absorption Probe
ORAL
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Authors
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Yohei Yamazawa
- Tokyo Electron AT LTD.
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Diagnostics of RF magnetron sputtering plasma for synthesizing transparent conductive Indium-Zinc-Oxide film
ORAL
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Authors
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Hiroyuki Kano
- NU EcoEngineering Co., Ltd.
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Takayuki Ohta
- Wakayama University
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Mari Inoue
- Wakayama University
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Naoki Takota
- Wakayama University
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Masafumi Ito
- Meijo University
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Yasuhiro Higashijima
- NU System Co., Ltd.
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Shoji Den
- Katagiri Engineering Co., Ltd.
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Koji Yamakawa
- Katagiri Engineering Co., Ltd.
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Masaru Hori
- Nagoya University
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Origin of electrical changes occurring at plasma etching endpoint
ORAL
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Authors
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Mark Sobolewski
- NIST
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David Lahr
- NIST
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Behavior of hydrogen atoms in plasma enhanced chemical vapor deposition of microcrystalline silicon film
ORAL
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Authors
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Yusuke Abe
- Nagoya University
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Sho Kawashima
- Nagoya University
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Keigo Takeda
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Makoto Sekin
- Nagoya University, JST-CREST
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Masaru Hori
- Nagoya University, JST-CREST
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Tomographic diagnostics of nonthermal plasmas
ORAL
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Authors
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Natalia Denisova
- Institute of Theoretical \& Applied Mechanics
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