Low Pressure Plasma Diagnostics

Presentations

• Plasma diagnostics using floating harmonics method and recent results in processing plasmas

  COFFEE_KLATCH · Invited

  Oct. 20, 2009, 10:00 AM – Oct. 20, 2009, 10:30 AM

  Authors

  • ChinWook Chung

    • Hanyang University
    • HanYang University
    • Hanyang university

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• Evaluation of Advanced Algorithms to improve EEDF extraction from Langmuir Probe data Using Tikhonov Regularization Methods

  ORAL

  Oct. 20, 2009, 10:30 AM – Oct. 20, 2009, 10:45 AM

  Authors

  • A. El Saghir

    • NCSU

  • C. Kennedy

    • NCSU

  • Steven Shannon

    • NCSU
    • North Carolina State University

  • B. Pathak

    • University of Kansas

  • J. Alexander

    • University of Kansas

  • K. Nordheden

    • University of Kansas

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• Impedance Characteristics of the Plasma Absorption Probe

  ORAL

  Oct. 20, 2009, 10:45 AM – Oct. 20, 2009, 11:00 AM

  Authors

  • Yohei Yamazawa

    • Tokyo Electron AT LTD.

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• Diagnostics of RF magnetron sputtering plasma for synthesizing transparent conductive Indium-Zinc-Oxide film

  ORAL

  Oct. 20, 2009, 11:00 AM – Oct. 20, 2009, 11:15 AM

  Authors

  • Hiroyuki Kano

    • NU EcoEngineering Co., Ltd.

  • Takayuki Ohta

    • Wakayama University

  • Mari Inoue

    • Wakayama University

  • Naoki Takota

    • Wakayama University

  • Masafumi Ito

    • Meijo University

  • Yasuhiro Higashijima

    • NU System Co., Ltd.

  • Shoji Den

    • Katagiri Engineering Co., Ltd.

  • Koji Yamakawa

    • Katagiri Engineering Co., Ltd.

  • Masaru Hori

    • Nagoya University

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• Origin of electrical changes occurring at plasma etching endpoint

  ORAL

  Oct. 20, 2009, 11:15 AM – Oct. 20, 2009, 11:30 AM

  Authors

  • Mark Sobolewski

    • NIST

  • David Lahr

    • NIST

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• Behavior of hydrogen atoms in plasma enhanced chemical vapor deposition of microcrystalline silicon film

  ORAL

  Oct. 20, 2009, 11:30 AM – Oct. 20, 2009, 11:45 AM

  Authors

  • Yusuke Abe

    • Nagoya University

  • Sho Kawashima

    • Nagoya University

  • Keigo Takeda

  • Makoto Sekin

    • Nagoya University, JST-CREST

  • Masaru Hori

    • Nagoya University, JST-CREST

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• Tomographic diagnostics of nonthermal plasmas

  ORAL

  Oct. 20, 2009, 11:45 AM – Oct. 20, 2009, 12:00 PM

  Authors

  • Natalia Denisova

    • Institute of Theoretical \& Applied Mechanics

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