Capacitively-Coupled Plasmas I

Presentations

• The electrical asymmetry effect in capacitive discharges

  COFFEE_KLATCH · Invited

  Oct. 20, 2009, 8:00 AM – Oct. 20, 2009, 8:30 AM

  Authors

  • Uwe Czarnetzki

    • Ruhr-University Bochum
    • Institute for Plasma and Atomic Physics, Ruhr-Universitaet Bochum
    • Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany

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• Experimental investigations of the Electrical Asymmetry Effect

  ORAL

  Oct. 20, 2009, 8:30 AM – Oct. 20, 2009, 8:45 AM

  Authors

  • Julian Schulze

    • Ruhr-University Bochum

  • Edmund Schuengel

    • Ruhr-University Bochum

  • Dirk Luggenhoelscher

    • Ruhr-University Bochum

  • Uwe Czarnetzki

    • Ruhr-University Bochum

  • Zoltan Donko

    • Hungarian Academy for Science

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• Dual-frequency capacitive radiofrequency discharges: Effect of low-frequency power on electron density and flux

  ORAL

  Oct. 20, 2009, 8:45 AM – Oct. 20, 2009, 9:00 AM

  Authors

  • Jean-Paul Booth

    • CNRS - Ecole Polytechnique
    • LPP, CNRS/Ecole Polytechnique, France

  • Garrett Curley

    • LPN

  • Dragana Maric

    • Institute of Physics, Zemun, Serbia

  • Jerome Bredin

    • LPP

  • Pascal Chabert

    • LPP, Ecole Polytechnique
    • CNRS-Ecole Polytechnique
    • LPP-Ecole Polytechnique-CNRS
    • Laboratoire de Physique des Plasmas, Ecole Polytechnique, France
    • LPP - Ecole Polytechnique
    • LPP

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• Non-linear frequency coupling in dual radio-frequency atmospheric pressure plasmas

  ORAL

  Oct. 20, 2009, 9:00 AM – Oct. 20, 2009, 9:15 AM

  Authors

  • Jochen Waskoenig

    • Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK

  • Timo Gans

    • Queen's University Belfast
    • Centre for Plasma Physics, Queens University Belfast, BT7 1NN Belfast, Northern Ireland, UK

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• EED$f$ of the DC+RF Hybrid Etcher: Simulation and Measurement

  ORAL

  Oct. 20, 2009, 9:15 AM – Oct. 20, 2009, 9:30 AM

  Authors

  • Lee Chen

    • Tokyo Electron America, Inc.

  • Lin Xu

  • Merritt Funk

    • Tokyo Electron America, Inc.
    • Tokyo Electron America

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