Capacitively-Coupled Plasmas

Presentations

• Nonlinear Effects on Heating in Capacitive Discharges

  COFFEE_KLATCH · Invited

  Oct. 17, 2008, 12:30 PM – Oct. 17, 2008, 1:00 PM

  Authors

  • Thomas Mussenbrock

    • Ruhr University Bochum

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• The RF Sheath, Nonlinearity and Stochastic heating: An extended analytical approach

  ORAL

  Oct. 17, 2008, 1:00 PM – Oct. 17, 2008, 1:15 PM

  Authors

  • Michael Klick

    • Plasmetrex GmbH
    • Plasmetrex GmbH, D12489 Berlin, Germany

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• Effects of Magnetic Field on Very High Frequency Capacitively Coupled Plasma

  ORAL

  Oct. 17, 2008, 1:15 PM – Oct. 17, 2008, 1:30 PM

  Authors

  • Kallol Bera

    • Applied Materials, Inc., Sunnyvale, CA

  • Shahid Rauf

    • Applied Materials, Inc., Sunnyvale, CA

  • Ken Collins

    • Applied Materials, Inc., Sunnyvale, CA

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• Resonance heating of dual frequency capacitive discharges

  ORAL

  Oct. 17, 2008, 1:30 PM – Oct. 17, 2008, 1:45 PM

  Authors

  • Dennis Ziegler

    • Ruhr University Bochum

  • Thomas Mussenbrock

    • Ruhr University Bochum
    • Ruhr University Bochum, D44780 Bochum, Germany

  • Ralf Peter Brinkmann

    • Ruhr University Bochum
    • Ruhr-Universitaet Bochum, Germany
    • Ruhr University Bochum, D44780 Bochum, Germany
    • Ruhr-University Bochum, Germany
    • Theoretical Electrical Engineering, Ruhr-Universit\"at-Bochum, D-44780 Bochum, Germany

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• Electrode Impedance Effect on Electron Density in a CCP Reactor

  ORAL

  Oct. 17, 2008, 1:45 PM – Oct. 17, 2008, 2:00 PM

  Authors

  • Yohei Yamazawa

    • Tokyo Electron AT LTD.

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• Characteristics of Pulsed Capacitively Coupled Plasma Sources for Plasma Etching

  ORAL

  Oct. 17, 2008, 2:00 PM – Oct. 17, 2008, 2:15 PM

  Authors

  • Ankur Agarwal

    • Applied Materials, Inc.

  • Phillip Stout

    • Applied Materials, Inc.

  • Shahid Rauf

    • Applied Materials, Inc.

  • Ken Collins

    • Applied Materials, Inc.

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• A Parallelized 3D Particle-In-Cell Method With Magnetostatic Field Solver And Its Applications

  ORAL

  Oct. 17, 2008, 2:15 PM – Oct. 17, 2008, 2:30 PM

  Authors

  • Kuo-Hsien Hsu

    • National Space Organization, Taiwan

  • Yen-Sen Chen

    • National Space Organization, Taiwan

  • Men-Zan Bill Wu

  • Jong-Shinn Wu

    • National Chiao-Tung University, Taiwan

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