Plasma Diagnostics II

Presentations

• Origin of electrical changes at plasma etching endpoints

  ORAL

  Oct. 17, 2008, 9:00 AM – Oct. 17, 2008, 9:15 AM

  Authors

  • Mark Sobolewski

    • National Institute of Standards and Technology

  • David Lahr

    • National Institute of Standards and Technology

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• Photon-assisted Beam Probes for Low Temperature Plasmas

  ORAL

  Oct. 17, 2008, 9:15 AM – Oct. 17, 2008, 9:30 AM

  Authors

  • Alvaro Garcia de Gorordo

    • The University of Texas at Austin

  • Gary A. Hallock

    • The University of Texas at Austin

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• Negative Ion Densities and EEDFs in BCl$_{3}$/N$_{2}$ and BCl$_{3}$/SF$_{6}$ CCP Plasmas

  ORAL

  Oct. 17, 2008, 9:30 AM – Oct. 17, 2008, 9:45 AM

  Authors

  • Bogdan Pathak

    • Plasma Research Laboratory, University of Kansas

  • John Alexander

    • Plasma Research Laboratory, University of Kansas

  • K. Nordheden

    • Plasma Research Laboratory, University of Kansas
    • The University of Kansas

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• Application of an RF Biased Langmuir Probe to Etch Reactor Chamber Matching, Fault Detection and Process Control

  ORAL

  Oct. 17, 2008, 9:45 AM – Oct. 17, 2008, 10:00 AM

  Authors

  • Douglas Keil

    • Lam Research Corporation

  • Jean-Paul Booth

    • Lam Research Corporation

  • Neil Benjamin

    • Lam Research Corporation

  • Chris Thorgrimsson

    • Lam Research Corporation

  • Mitchell Brooks

    • Lam Research Corporation

  • Mikio Nagai

    • Lam Research Corporation

  • Luc Albarede

    • Lam Research Corporation

  • Jung Kim

    • Lam Research Corporation

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• Simultaneous determination of electron density and electron temperature in low-pressure plasmas using the Multipole Resonance Probe

  ORAL

  Oct. 17, 2008, 10:00 AM – Oct. 17, 2008, 10:15 AM

  Authors

  • Martin Lapke

    • Ruhr University Bochum

  • Thomas Mussenbrock

    • Ruhr University Bochum

  • Ralf Peter Brinkmann

    • Ruhr University Bochum
    • Ruhr-Universitaet Bochum, Germany
    • Ruhr University Bochum, D44780 Bochum, Germany
    • Ruhr-University Bochum, Germany
    • Theoretical Electrical Engineering, Ruhr-Universit\"at-Bochum, D-44780 Bochum, Germany

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• A direct measurement of the energy flux density in plasma surface interaction

  ORAL

  Oct. 17, 2008, 10:15 AM – Oct. 17, 2008, 10:30 AM

  Authors

  • Remi Dussart

    • GREMI

  • Anne-Lise Thomann

    • GREMI

  • Nadjib Semmar

    • GREMI

  • Laurianne Pichon

    • GREMI

  • Larbi Bedra

    • GREMI

  • Jacky Mathias

    • GREMI

  • Yves Tessier

    • GREMI

  • Philippe Lefaucheux

    • GREMI

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• Development of a compact, high energy electron beam source

  ORAL

  Oct. 17, 2008, 10:30 AM – Oct. 17, 2008, 10:45 AM

  Authors

  • Scott Walton

    • Naval Research Laboratory

  • R.F. Fernsler

    • Naval Research Laboratory

  • Robert Meger

    • Naval Research Laboratory

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• ABSTRACT WITHDRAWN

  Oct. 17, 2008, 10:45 AM – Oct. 17, 2008, 11:00 AM

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