Material Processing I
ORAL · RR1 ·
Presentations
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Plasma Characterization of MPCVD Discharges for Nanocrystalline Diamond Deposition
ORAL
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Authors
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Leigh Winfrey
- NC State University
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Steve Shannon
- NC State University
- NC State University, Department of Nuclear Engineering
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Richard Chromik
- McGill University
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Kathryn Wahl
- Naval Research Laboratory
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Robert Nemanich
- Arizona State University
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Mohamed Bourham
- NC State University
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Nano-particle manipulation using pulse RF discharges with amplitude modulation
ORAL
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Authors
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Shinya Iwashita
- Kyushu University
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Hiroshi Miyata
- Kyushu University
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Hidefumi Matsuzaki
- Kyushu University
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Kazunori Koga
- Kyushu University
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Masaharu Shiratani
- Kyushu Univ., JST, CREST
- Kyushu University, JST, CREST
- Kyushu University
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GEC Student Award for Excellence Finalist: Plasma controlled adatom delivery and (re)distribution: enabling uninterrupted low temperature growth of ultra long vertically aligned carbon nanotubes
ORAL
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Authors
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Eugene Tam
- The University of Sydney
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Kostya Ostrikov
- CSIRO
- The University of Sydney
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Thermal treatment influence on magnetoresistive properties of the MgF$_2$ - Co and and MgF$_2$ - Permalloy films prepared by thermoelectron sustained vacuum discharge
ORAL
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Authors
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C.P. Lungu
- National Institute for Laser, Plasma and Radiation Physics
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I. Mustata
- National Institute for Laser, Plasma and Radiation Physics
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A. Anghel
- National Institute for Laser, Plasma and Radiation Physics
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A.M. Lungu
- National Institute for Laser, Plasma and Radiation Physics
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O. Pompilian
- National Institute for Laser, Plasma and Radiation Physics
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C. Porosnicu
- National Institute for Laser, Plasma and Radiation Physics
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C. Ticos
- National Institute for Laser, Plasma and Radiation Physics
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V. Kuncser
- National Institute for Material Physics
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G. Schinteie
- National Institute for Material Physics
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D. Predoi
- National Institute for Material Physics
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High Aspect Ratio HBr Based Dry Etching of GaInAsP/InP for Nanoscale Photonic Couplers
ORAL
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Authors
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Nahid Sultana
- The University of Texas at Dallas
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Wei Zhou
- The University of Texas at Dallas
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Duncan MacFarlane
- The University of Texas at Dallas
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Control of deposition profile of plasma CVD hard carbon films on substrates with trenches
ORAL
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Authors
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Masaharu Shiratani
- Kyushu Univ., JST, CREST
- Kyushu University, JST, CREST
- Kyushu University
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Jun Umetsu
- Kyushu University
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Kazuhiko Inoue
- Kyushu University
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Takuya Nomura
- Kyushu University
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Hidefumi Matsuzaki
- Kyushu University
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Kazunori Koga
- Kyushu University, JST, CREST
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Yuichi Setsuhara
- Osaka University, JST, CREST
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Makoto Sekine
- Nagoya University, JST, CREST
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Masaru Hori
- Nagoya University, JST, CREST
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Plasma assisted deposition of metal fluorides for 193nm applications
ORAL
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Authors
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Martin Bischoff
- Fraunhofer IOF Jena
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Maik Sode
- Fraunhofer IOF Jena
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Dieter Gaebler
- Fraunhofer IOF Jena
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Norbert Kaiser
- Fraunhofer IOF Jena
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Andreas Tuennermann
- Fraunhofer IOF Jena
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