Interconnected Microcavity Plasma Arrays: New Opportunity For Microplasma Chemical Reactors

Various microchemical reactors consisting of parallel, linear arrays of interconnected cylindrical microcavity plasma devices have been fabricated by replica molding in ultraviolet-curable polymer. Tests of 10 $\times $ 10 arrays of 400 $\mu $m dia. devices with 125 $\mu $m wide gas flow channels have been conducted in rare gas and Ar/CS$_{2}$ flows and excitation of the array with a sinusoidal voltage. Visible chemiluminescence ($\lambda \sim $505 nm) resulting from the A $\to $ X transition of CS$_{2}^{+}$ and the deposition of a (C -- S)$_{n}$ microstructured polymer have been observed in the Ar/CS$_{2}$ flow experiments. Microplasma properties in a restricted gas flow and the potential of these arrays for microchemical applications will be discussed.