Negative Ion Plasmas

Presentations

• Discharges In Electronegative Gases

  COFFEE_KLATCH · Invited

  Oct. 14, 2008, 3:00 PM – Oct. 14, 2008, 3:30 PM

  Authors

  • R.N. Franklin

    • The Open University, UK
    • The Open University, Oxford Research Unit, UK

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• Electronegative Plasma Discharge Equilibria

  COFFEE_KLATCH · Invited

  Oct. 14, 2008, 3:30 PM – Oct. 14, 2008, 4:00 PM

  Authors

  • Allan J. Lichtenberg

    • University of California, Berkeley - Electrical Engineering

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• Global Models for Electronegative Discharges

  ORAL

  Oct. 14, 2008, 4:00 PM – Oct. 14, 2008, 4:15 PM

  Authors

  • Derek D. Monahan

  • Miles M. Turner

    • Dublin City University, Ireland

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• Negative Ion Extraction from a Pulsed NF3 Plasma

  ORAL

  Oct. 14, 2008, 4:15 PM – Oct. 14, 2008, 4:30 PM

  Authors

  • Svetlana Radovanov

    • Varian Semiconductor Equipment Associates

  • Ludovic Godet

    • Varian Semiconductor Equipment Associates

  • Rajesh Dorai

    • Varian Semiconductor Equipment Associates

  • Vikram Singh

    • Varian Semiconductor Equipment Associates

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